[1] 张剑寒, 张宇民, 韩杰才, 等. 空间用碳化硅反射镜的设计制造与测试［J］. 光学 精密工程, 2006, 14(2): 179-184.

    ZHANG J H, ZHANG Y M, HAN J C, et al.. Design, fabrication and testing of space-borne SiC mirror［J］. Opt. Precision Eng., 2006, 14(2): 179-184. (in Chinese)

[2] Sarro P M. Silicon carbide as a new MEMS technology［J］. Sensors and Actuators A: Physical, 2000, 82(1-3): 210-218.

[3] Wijesundara M, Azevedo R. Silicon Carbide Microsystems for Harsh Environments［M］. New York: Springer, 2011.

[4] Sein E, Toulemont Y, Safa F, et al.. A Φ 3.5 m diameter Sic telescope for Herschel mission［C］. Astronomical Telescopes and Instrumentation, SPIE, 2003: 606-618.

[5] 刘立飞, 张飞虎, 刘民慧. 碳化硅陶瓷的超声振动辅助磨削［J］. 光学 精密工程, 2015, 23(8): 2229-2235.

    LIU L F, ZHANG F H, LIU M H. Ultrasonic assisted grinding for silicon carbide［J］. Opt. Precision Eng., 2015, 23(8): 2229-2235. (in Chinese)

[6] DOI T, UHLMANN E, MARINESCU I D. Handbook of Ceramics Grinding and Polishing［M］. 2nd ed. Waltham, MA: William Andrew, 2014.

[7] WU C J, LI B Z, YANG J G, et al.. Prediction of grinding force for brittle materials considering co-existing of ductility and brittleness［J］. The International Journal of Advanced Manufacturing Technology, 2016, 87(5-8): 1967-1975.

[8] CHENG J, WU J, GONG Y D, et al.. Grinding forces in micro slot-grinding (MSG) of single crystal sapphire［J］. International Journal of Machine Tools and Manufacture, 2017, 112: 7-20.

[9] XU S, YAO Z Q, ZHANG M C. Material removal behavior in scratching of zirconia ceramic surface treated with laser thermal shock［J］. The International Journal of Advanced Manufacturing Technology, 2016, 85(9-12): 2693-2701.

[10] DAI C W, DING W F, XU J H, et al.. Investigation on size effect of grain wear behavior during grinding nickel-based superalloy Inconel 718［J］. The International Journal of Advanced Manufacturing Technology, 2017, 91(5-8): 2907-2917.

[11] QIU ZH J, LIU C C, WANG H R, et al.. Crack propagation and the material removal mechanism of glass-ceramics by the scratch test［J］. Journal of the Mechanical Behavior of Biomedical Materials, 2016, 64: 75-85.

[12] SUBHASH G, KLECKA M. Ductile to brittle transition depth during single-grit scratching on alumina ceramics［J］. Journal of the American Ceramic Society, 2007, 90(11): 3704-3707.

[13] ZHANG F H, MENG B B, GENG Y Q, et al.. Friction behavior in nanoscratching of reaction bonded silicon carbide ceramic with Berkovich and sphere indenters［J］. Tribology International, 2016, 97: 21-30.

[14] AHN Y, FARRIS T N, CHANDRASEKAR S. Sliding microindentation fracture of brittle materials: Role of elastic stress fields［J］. Mechanics of Materials, 1998, 29(3-4): 143-152.

[15] Le Houérou V, Sangleboeuf J C, Dériano S, et al.. Surface damage of soda-lime-silica glasses: indentation scratch behavior［J］. Journal of Non-Crystalline Solids, 2003, 316(1): 54-63.