半导体光电, 2013, 34 (4): 607, 网络出版: 2013-08-28
离子辅助沉积电子束蒸发Si基SiO2薄膜的研究
Study on Performance of Si-based SiO2 Optical Films with IBAD Electron Beam Evaporation
补充材料
陈京湘, 崔碧峰, 丁颖, 计伟, 王晓玲, 张松, 凌小涵, 李佳莼, 马钰慧, 苏道军. 离子辅助沉积电子束蒸发Si基SiO2薄膜的研究[J]. 半导体光电, 2013, 34(4): 607. CHEN Jingxiang, CUI Bifeng, DING Ying, JI Wei, WANG Xiaoling, ZHANG Song, LING Xiaohan, LI Jiachun, MA Yuhui, SU Daojun. Study on Performance of Si-based SiO2 Optical Films with IBAD Electron Beam Evaporation[J]. Semiconductor Optoelectronics, 2013, 34(4): 607.