光学 精密工程, 2017, 25 (6): 1449, 网络出版: 2017-07-10
基于并行共聚焦显微系统的物方差动轴向测量
Object-side based differential axial measurement based on parallel confocal microscopy
图 & 表
刘志群, 易定容, 孔令华, 张勇贞, 刘婷, 王梓. 基于并行共聚焦显微系统的物方差动轴向测量[J]. 光学 精密工程, 2017, 25(6): 1449. LIU Zhi-qun, YI Ding-rong, KONG Ling-hua, ZHANG Yong-zhen, LIU Ting, WANG Zi. Object-side based differential axial measurement based on parallel confocal microscopy[J]. Optics and Precision Engineering, 2017, 25(6): 1449.