[1] Lin H K, Hsu W C. Electrode patterning of ITO thin films by high repetition rate fiber laser[J]. Applied Surface Science, 2014, 308: 58-62.

[2] 王佳伟, 罗凤凤. Fe离子注入ITO薄膜的光电磁性质研究[J]. 江西科学, 2019, 37(1): 17-20, 25.

    Wang J W, Luo F F. Optical, electrical and magnetic properties of Fe ions implanted ITO thin film[J]. Jiangxi Science, 2019, 37(1): 17-20, 25.

[3] 袭著有, 许启明, 赵鹏, 等. ITO薄膜特性及发展方向[J]. 西安建筑科技大学学报(自然科学版), 2004, 36(1): 109-112.

    Xi Z Y, Xu Q M, Zhao P, et al. Review of the characteristies of ITO thin films and its development[J]. Journal of Xi'an University of Architecture &Technology(Natural Science Edition), 2004, 36(1): 109-112.

[4] SakamotoK, KuwaeH, KobayashiN, et al. Highly bendable transparent electrode using mesh patterned indium tin oxide for flexible electronic devices[C]∥2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), April 9-12, 2017, Los Angeles, CA, USA. New York: IEEE, 2017: 323- 326.

[5] 杨惠尹, 陈雪, 钱子勍. 热光伏系统中ITO薄膜滤波器的设计与制备[J]. 光学学报, 2013, 33(12): 1231003.

    Yang H Y, Chen X, Qian Z Q. Design and preparation of ITO film filter used in thermal photovoltaic system[J]. Acta Optica Sinica, 2013, 33(12): 1231003.

[6] 张勇辉, 郭伟玲, 秦园, 等. ITO对新型AlGaInP红光LED特性的影响[J]. 光学学报, 2010, 30(8): 2401-2405.

    Zhang Y H, Guo W L, Qin Y, et al. Effects of ITO on proprieties of novel AlGaInP red LED[J]. Acta Optica Sinica, 2010, 30(8): 2401-2405.

[7] 蔡昕旸, 王新伟, 李如雪, 等. ITO薄膜表面等离子体共振波长的可控调节[J]. 激光与光电子学进展, 2018, 55(5): 051602.

    Cai X Y, Wang X W, Li R X, et al. Controllable modulation of surface plasmon resonance wavelength of ITO thin films[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051602.

[8] Heo J, Oh G T, Kwon S J, et al. Fabrication of transparent ITO-Ag-ITO electrodes on polyethylene terephthalate substrate by Nd∶YVO4 laser direct patterning[J]. Molecular Crystals and Liquid Crystals, 2017, 645(1): 16-24.

[9] Shen X F, Chen T. 291-[J]. Liu N. Patterning of ITO on glass with two-step using excimer laser, wet chemical re-etching. Advanced Materials Research, 2011, 294: 1393-1398.

[10] Lee Y J, Bae J W, Han H R, et al. Dry etching characteristics of ITO thin films deposited on plastic substrates[J]. Thin Solid Films, 2001, 383(1/2): 281-283.

[11] 毕洪梅, 史国滨, 陈志诚, 等. 光刻技术与电化学相结合的叉指微电极制备工艺研究[J]. 内蒙古大学学报(自然科学版), 2018, 49(2): 144-149.

    Bi H M, Shi G B, Chen Z C, et al. Preparation of interdigitated microelectrodes based on the combination of photolithography and electrochemistry technology[J]. Journal of Inner Mongolia University(Natural Science Edition), 2018, 49(2): 144-149.

[12] Grisotto F, Métayé R, Jousselme B, et al. Scanning electrochemical microscopy as an etching tool for ITO patterning[J]. Journal of Materials Chemistry, 2011, 21(40): 15962-15968.

[13] 翟莲娜, 周化岚, 李小慧, 等. 氧化铟锡透明导电电极的刻蚀研究[J]. 腐蚀科学与防护技术, 2014, 26(1): 41-44.

    Zhai L N, Zhou H L, Li X H, et al. Etching of transparent and conductive indium tin oxide films[J]. Corrosion Science and Protection Technology, 2014, 26(1): 41-44.

[14] Huang C J, Su Y K, Wu S L. The effect of solvent on the etching of ITO electrode[J]. Materials Chemistry and Physics, 2004, 84(1): 146-150.

[15] 姚亮, 张永爱, 雷晓阳, 等. 平板显示器中ITO透明电极制备的研究[J]. 液晶与显示, 2008, 23(1): 16-20.

    Yao L, Zhang Y A, Lei X Y, et al. Preparation of ITO transparent electrode for FPD[J]. Chinese Journal of Liquid Crystals and Displays, 2008, 23(1): 16-20.

[16] 冯泉, 周明祥, 侯宗林. 涂胶显影技术改进对光刻工艺的影响[J]. 电子工业专用设备, 2017, 46(2): 19-24.

    Feng Q, Zhou M X, Hou Z L. Coating and developing technology introduction affects lithography process[J]. Equipment for Electronic Products Manufacturing, 2017, 46(2): 19-24.

[17] Tsai T H, Wu Y F. Wet etching mechanisms of ITO films in oxalic acid[J]. Microelectronic Engineering, 2006, 83(3): 536-541.

[18] 崔锦江. 用于平板显示器制造业的快速激光刻蚀与湿法光刻技术之比较[J]. 光机电信息, 2008, 25(4): 11-18.

    Cui J J. Comparison of fast laser etching and wet lithography for flat panel display manufacturing[J]. Ome Information, 2008, 25(4): 11-18.

[19] 闻伟, 杨传仁, 张继华, 等. ITO/PLZT薄膜湿法刻蚀研究[J]. 压电与声光, 2008, 30(6): 745-746, 750.

    Wen W, Yang C R, Zhang J H, et al. Study on wet-etching of ITO thin films based on PLZT[J]. Piezoelectrics & Acoustooptics, 2008, 30(6): 745-746, 750.