中国激光, 2013, 40 (1): 0106001, 网络出版: 2012-12-05  

预辅Al及AlN缓冲层厚度对GaN/Si(111)材料特性的影响

Effects of AlN Buffer Layer Thickness and Al Pre-Treatment on Properties of GaN/Si(111) Epilayer
作者单位
1 长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
2 中国科学院苏州纳米技术与纳米仿生研究所, 江苏 苏州 215123
引用该论文

廉瑞凯, 李林, 范亚明, 王勇, 邓旭光, 张辉, 冯雷, 朱建军, 张宝顺. 预辅Al及AlN缓冲层厚度对GaN/Si(111)材料特性的影响[J]. 中国激光, 2013, 40(1): 0106001.

Lian Ruikai, Li Lin, Fan Yaming, Wang Yong, Deng Xuguang, Zhang Hui, Feng Lei, Zhu Jianjun, Zhang Baoshun. Effects of AlN Buffer Layer Thickness and Al Pre-Treatment on Properties of GaN/Si(111) Epilayer[J]. Chinese Journal of Lasers, 2013, 40(1): 0106001.

参考文献

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廉瑞凯, 李林, 范亚明, 王勇, 邓旭光, 张辉, 冯雷, 朱建军, 张宝顺. 预辅Al及AlN缓冲层厚度对GaN/Si(111)材料特性的影响[J]. 中国激光, 2013, 40(1): 0106001. Lian Ruikai, Li Lin, Fan Yaming, Wang Yong, Deng Xuguang, Zhang Hui, Feng Lei, Zhu Jianjun, Zhang Baoshun. Effects of AlN Buffer Layer Thickness and Al Pre-Treatment on Properties of GaN/Si(111) Epilayer[J]. Chinese Journal of Lasers, 2013, 40(1): 0106001.

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