用于光刻投影物镜检测的高精度菲佐干涉仪误差分析 下载: 534次
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苗二龙, 张健, 谷勇强, 康玉思, 刘伟奇. 用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J]. 中国激光, 2010, 37(8): 2029. Miao Erlong, Zhang Jian, Gu Yongqiang, Kang Yusi, Liu Weiqi. Measurement Error Analysis of High Precision Fizeau Interferometer for Lithography Projection Objective[J]. Chinese Journal of Lasers, 2010, 37(8): 2029.