利用Mirau显微干涉仪测量微器件的纳米级运动
郭彤, 胡春光, 胡晓东, 栗大超, 金翠云, 傅星, 胡小唐. 利用Mirau显微干涉仪测量微器件的纳米级运动[J]. 光子学报, 2005, 34(10): 1542.
郭彤, 胡春光, 胡晓东, 栗大超, 金翠云, 傅星, 胡小唐. Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer[J]. ACTA PHOTONICA SINICA, 2005, 34(10): 1542.
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郭彤, 胡春光, 胡晓东, 栗大超, 金翠云, 傅星, 胡小唐. 利用Mirau显微干涉仪测量微器件的纳米级运动[J]. 光子学报, 2005, 34(10): 1542. 郭彤, 胡春光, 胡晓东, 栗大超, 金翠云, 傅星, 胡小唐. Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer[J]. ACTA PHOTONICA SINICA, 2005, 34(10): 1542.
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