[1] Burdess J S, Harris A J,Wood D, et al. A system for dynamic characterization of microstructures. J Microelectroech Syst , 1997,6(4): 322～328

[2] Burns D J, Helbig H F. A system for automatic electrical and optical characterization of microelectromechanical devices. J Microelectromech Syst, 1999,8(4) : 473～482

[3] 李鸣明,王昭,贾书海,等.光纤传感器在微机电系统振动测量中的应用.光子学报,2001,30(4):438～441Li M M,Wang Z,Jia S H,et al. Acta Photonica Sinica,2001,30(4) :438～441

[4] 惠梅,牛憨笨,许谊,等.表面微观形貌测量中数字图象处理的应用.光子学报,2001,30(11):1372～1375Hui M, Niu H B, Xu Y, et al. Acta Photonica Sinica,2001,30(11) :1372～1375

[5] Hart M R, Conant R A, Lau K Y, et al. Stroboscopic interferometer system for dynamic MEMS characterization. J Microelectromech Syst, 2000,9 (4):409～418

[6] Krehl P, Engemann S, Rembe C, et al. High-speed visualization, a powerful diagnostic tool for microactuators - retrospect and prospect. Microsystem Technologies, 1999,5(3): 113～132

[7] Rembe C,Muller R S. Measurement system for full three dimensional motion characterization of MEMS. J Microelectromech Syst, 2002,11 (5): 479 ～ 488

[8] Tang W C, Nguyen C H,Judy M W,et al. Eletrostaticcomb drive for lateral polysilicon resonators. Sensors & Actuators A,1990,21(2): 328～331

[9] Davis C Q, Freeman D M. Using a light microscope to measure motions with nanometer accuracy. Opt Eng,1998,37(4): 1299～1304