光谱学与光谱分析, 2017, 37 (2): 391, 网络出版: 2017-06-20
射频磁控溅射法制备氮化硅基ZnO薄膜的光致发光性能研究
Photoluminescence of Silicon Nitride-Based ZnO Thin Film Developed with RF Magnetron Sputtering
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陈璟涵, 姚文清, 朱永法. 射频磁控溅射法制备氮化硅基ZnO薄膜的光致发光性能研究[J]. 光谱学与光谱分析, 2017, 37(2): 391. CHEN Jing-han, YAO Wen-qing, ZHU Yong-fa. Photoluminescence of Silicon Nitride-Based ZnO Thin Film Developed with RF Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2017, 37(2): 391.