光子学报, 2009, 38 (1): 160, 网络出版: 2010-05-10
Mo/Si多层膜表面保护层设计
Design of Capping Layers on Mo/Si Multilayer
图 & 表
徐达, 朱京涛, 张众, 王风丽, 王晓强, 王洪昌, 蒋励, 佘仕凤, 王占山, 秦树基, 陈玲燕. Mo/Si多层膜表面保护层设计[J]. 光子学报, 2009, 38(1): 160. XU Da, ZHU Jing-tao, ZHANG Zhong, WANG Feng-li, WANG Xiao-qiang, WANG Hong-chang, JIANG Li, SHE Shi-feng, WANG Zhan-shan, QIN Shu-ji, CHEN Ling-yan. Design of Capping Layers on Mo/Si Multilayer[J]. ACTA PHOTONICA SINICA, 2009, 38(1): 160.