半导体光电, 2020, 41 (3): 395, 网络出版: 2020-06-18
深紫外CMOS图像传感器测试匀光系统设计
Design of Homogenizing Optical System for Testing CMOS Image Sensor in Deep Ultraviolet Region
图 & 表
李琦, 齐月静, 卢增雄, 张清洋, 马敬, 杨光华, 苏佳妮. 深紫外CMOS图像传感器测试匀光系统设计[J]. 半导体光电, 2020, 41(3): 395. LI Qi, QI Yuejing, LU Zengxiong, ZHANG Qingyang, MA Jing, YANG Guanghua, SU Jiani. Design of Homogenizing Optical System for Testing CMOS Image Sensor in Deep Ultraviolet Region[J]. Semiconductor Optoelectronics, 2020, 41(3): 395.