光学学报, 1991, 11 (4): 294, 网络出版: 2007-11-12
用塞曼双频激光器作光源的一种新颖长扫描表面的仪器设计
A Novel Long-scanning Surface Instrument Design Using a Zeeman 2-f requency Laser
摘要
本文报道一套光学结构用于同步辐射反射镜表面轮廓高精度大面积的测量。采用了光学外差测量与接收技术,以伺服聚焦双折射透镜组分离“o”光与“e”光的聚焦区域,并再共轴组合比较其相位差,从而获得表面起伏的误差值。线性运动的测量工作台使镜面可测量范围从数微米到一米,而最小起伏量及曲率可达很高的测量精度。
Abstract
A novel optical profiler design is described in this paper for measuring surface profiles of synchrotron radiation (SE) mirrors. The measurement is based on the combination of an optical heterodyne technique and precise phase measurement without a reference surface. A Zeeman 2-frequency He-Ne laser is employed as the light source. The common-path optical system which uses a biref ringent lens as the beam splitter makes it possible to minimize the effects due to air turbulence, sample vibration and temperature fluctuation. The profiler can be used to measure the roughness and curvature of a sample surface based on a special autofocus system. The optical system is mounted on a large linear air-bearing slide, and is capable of scanning over distances covering the spatial measurable period range from several microns to nearly one meter with a very high measuring accuracy.
参考文献
林跃, Peter Z. Takacs, 王润文, 陈祥祯. 用塞曼双频激光器作光源的一种新颖长扫描表面的仪器设计[J]. 光学学报, 1991, 11(4): 294. 林跃, Peter Z. Takacs, 王润文, 陈祥祯. A Novel Long-scanning Surface Instrument Design Using a Zeeman 2-f requency Laser[J]. Acta Optica Sinica, 1991, 11(4): 294.