中国激光, 2017, 44 (1): 0103001, 网络出版: 2017-01-10 复制并引用该论文  本文已被引 3 次  被引通知

图 & 表

图 1. 纳米孔径针尖测量薄膜中缺陷的实验原理

Fig. 1. Experimental principle of the measurement of detects in thin films by using nano aperture tip

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图 2. AFM和SNOM同时测量的结果。(a) AFM图;(b) SNOM图;(c) AFM图中裂纹的剖面图及宽度;(d) SNOM图中的裂纹剖面图;(e) SNOM图中裂纹剖面图及一个最小裂纹的宽度;(f) SNOM图中两个线状节瘤剖面图及它们之间的距离

Fig. 2. Measurement results of AFM and SNOM at the same time. (a) AFM graph; (b) SNOM graph; (c) profile graph and width of the flaw in AFM graph; (d) profile graph of the flaw in SNOW graph; (e) profile graph and a minimum width of the crack in SNOM graph; (f) profile graph of two line knots and their distance in SNOM graph

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图 3. 薄膜表面微孔与内部多节瘤同时测量的(a)AFM图和(b)SNOM图

Fig. 3. (a) AFM and (b) SNOM graphs of surface microhole and internal multi-knots on the thin film surfaces of simultaneous measurement

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白忠臣, 黄兆岭, 郝礼才, 陆安江, 秦水介. 近场显微成像法识别高功率激光镜片薄膜内部缺陷[J]. 中国激光, 2017, 44(1): 0103001. Bai Zhongchen, Huang Zhaoling, Hao Licai, Lu Anjiang, Qin Shuijie. Identifying Defects in Thin Film of High Power Laser Lens by Using Near Field Microimaging Method[J]. Chinese Journal of Lasers, 2017, 44(1): 0103001.