中国激光, 2021, 48 (2): 0202018, 网络出版: 2021-01-06
空间整形飞秒激光图案化加工氧化石墨烯 
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Patterned Graphene Oxide by Spatially-Shaped Femtosecond Laser
图 & 表
图 1. 基于SLM的飞秒激光空间整形、加工光学系统及计算相位图的算法。(a)飞秒激光空间整形、加工光学系统; (b)G-S迭代算法的示意图
Fig. 1. SLM-based optical system for space shaping and processing of femtosecond laser, and phase calculation algorithm. (a) Optical system for space shaping and processing of femtosecond laser; (b) schematic illustration of G-S iteration algorithm
图 2. 两种方法加工结果的对比。(a)在SLM上加载的不同相位及获得的不同光场分布(加载计算得到的相位获得整形激光,加载平面相位获得高斯激光); (b)空间整形激光辐照区域的微观形貌; (c)激光逐点扫描区域的微观形貌; (d)空间整形激光辐照区域的深度分布; (e)激光逐点扫描区域的深度分布
Fig. 2. Comparison of processing results of two methods. (a) Two phases loaded on SLM and corresponding optical field distributions (load calculated phase to obtain spatially shaped laser and load plane phase to obtain Gaussian laser); (b) micromorphology of region irradiated by spatially shaped laser; (c) micromorphology of region for laser point-by-point scanning; (d) height distribution of spatially shaped laser irradiated pattern; (e) height distribution of region for laser point-by-point scanning
图 3. 不同辐照时间和激光通量下空间整形激光辐照法的加工结果。(a)不同辐照时间和激光通量下辐照加工结果的微观形貌;(b)加工区域的拉曼光谱(以G峰强度为基础进行归一化);(c) ID/IG和I2D/IG随时间的变化趋势
Fig. 3. Processing results of spatially shaped laser irradiation method under different irradiation time and laser fluence. (a) Micromorphology of processing results under different irradiation time and laser fluence; (b) Raman spectra of processed regions (normalized based on intensity of peak G); (c) variations of ID/IG and I2D/IG with irradiation time
图 4. 不同激光通量和扫描速度下的激光逐点扫描法加工结果。(a)不同激光通量和扫描速度下加工区域的微观形貌;(b)不同通量的激光扫描后的拉曼光谱结果;(c) ID/IG和I2D/IG随激光通量的变化趋势
Fig. 4. Laser point-by-point scanning results under different laser fluence and scanning speed. (a) Micromorphologies of processed region for different fluence and scanning speed; (b) Raman spectra after scanning by laser under varying fluence; (c) variations of ID/IG and I2D/IG with laser fluence
图 5. 空间整形激光辐照法得到的字母图案。(a)三个字母对应的相位图;(b)根据三个相位图计算的焦点处光场分布;(c)~(e)辐照加工的三个字母的微观形貌及局部放大图
Fig. 5. Patterns of three letters fabricated by spatially shaped laser irradiation. (a) Phases corresponding to three letters; (b) simulated optical fields at focused point corresponding to three phase patterns; (c)--(e) micromorphologies of three letter patterns obtained by spatially shaped laser irradiation and local amplification maps
郭恒, 闫剑锋, 李欣, 曲良体. 空间整形飞秒激光图案化加工氧化石墨烯[J]. 中国激光, 2021, 48(2): 0202018. Heng Guo, Jianfeng Yan, Xin Li, Liangti Qu. Patterned Graphene Oxide by Spatially-Shaped Femtosecond Laser[J]. Chinese Journal of Lasers, 2021, 48(2): 0202018.
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