光学 精密工程, 2016, 24 (11): 2746, 网络出版: 2016-12-26
MEMS硅半球陀螺球面电极成形工艺
Development of spherical capacitive electrodes of MEMS silicon hemispherical gyros
补充材料
庄须叶, 喻磊, 王新龙, 李平华, 吕东锋, 郭群英. MEMS硅半球陀螺球面电极成形工艺[J]. 光学 精密工程, 2016, 24(11): 2746. ZHUANG Xu-ye, YU Lei, WANG Xin-long, LI Ping-hua, L Dong-feng, GUO Qun-ying. Development of spherical capacitive electrodes of MEMS silicon hemispherical gyros[J]. Optics and Precision Engineering, 2016, 24(11): 2746.