MEMS硅半球陀螺球面电极成形工艺
[1] 曹慧亮, 王玉良, 石云波, 等.硅微陀螺正交误差校正方案优化[J]. 光学 精密工程, 2016, 24(1): 134-142.
[2] 姜劭栋, 苏岩, 施芹, 等.双质量振动式硅微陀螺理论和实验模态分析[J]. 光学 精密工程, 2015, 23(2): 467-476.
[3] 吴志强, 杨亮, 夏国明, 等.基于带通Σ-Δ调制器的硅微机械陀螺力反馈闭环检测[J]. 光学 精密工程, 2015, 23(9): 2540-2545.
[4] WOO J K, CHO J Y, CHRISTOPHER B, et al.. Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope(WA-BRG) [C]. IEEE MEMS 2014, San Francisco, USA, 2014: 20-23.
[5] DORUK S, MOHAMMAD J A, SINA A, et al.. MEMS micro-glassblowing paradigm for wafer-level fabrication of fused silica wineglass gyroscopes [J]. Procedia Engineering, 2014, 32(12): 12-16.
[6] SORENSON L D, GAO F X. Ayazi.3-D micromachined hemispherical shell resonators with integrated capaitive transducers [C]. IEEE MEMS 2012, Pairs, France, 2012: 168-171.
[7] PAI P, CHOWDHURY F K, POURZAND H, et al.. Fabrication and testing of hemispherical MEMS wineglass resonators [C]. IEEE MEMS 2013, Taibei, 2013: 677-680.
[8] CHO J K, YAN J, PETERSON R L, et al.. A High-Q Birdbath Resonator Gyroscope(BRG) [C]. IEEE Transducers 2013, Barcelona, 2013: 1847-1850.
[9] MEHANATHAN N, TAVASSOLI V, SHAO P, et al.. Invar-36 micro hemispherical shell resonators [C]. IEEE MEMS 2014, San Francisco, 2014: 40-43.
[10] CHO J Y, NAJAFI K. 3-Dimensional blow torch-molding of fused silica microstructures [J].Journal of Microelectromechanical Systems, 2013, 22(3): 1-9.
[11] BERNSTELN J, WEINBERG M S, CHAPARALA M, et al.. MEMS hemispherical resonator gyroscope [P]. US: 2013/0104653 A1, 2013.
[12] JOAN G, JASON M G, JONAS G, et al.. Design, fabrication, and characterization of a micromachined galss-blown spherical resonator with insitu integrated silicon electrodes and ALD tungsten interior coating [C].IEEE MEMS 2015, Estoril, 2015: 805-808.
庄须叶, 喻磊, 王新龙, 李平华, 吕东锋, 郭群英. MEMS硅半球陀螺球面电极成形工艺[J]. 光学 精密工程, 2016, 24(11): 2746. ZHUANG Xu-ye, YU Lei, WANG Xin-long, LI Ping-hua, L Dong-feng, GUO Qun-ying. Development of spherical capacitive electrodes of MEMS silicon hemispherical gyros[J]. Optics and Precision Engineering, 2016, 24(11): 2746.