光学学报, 2009, 29 (7): 1877, 网络出版: 2009-07-20   

基于白光干涉的光学薄膜物理厚度测量方法 下载: 959次

Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry
作者单位
浙江大学现代光学仪器国家重点实验室, 浙江 杭州 310027
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薛晖, 沈伟东, 顾培夫, 罗震岳, 刘旭, 章岳光. 基于白光干涉的光学薄膜物理厚度测量方法[J]. 光学学报, 2009, 29(7): 1877.

Xue Hui, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, Zhang Yueguang. Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry[J]. Acta Optica Sinica, 2009, 29(7): 1877.

参考文献

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[15] 李毛和,张美敦. 用光纤迈克耳孙干涉仪测量折射率[J]. 光学学报, 2000, 20(9): 1294~1296

    Li Maohe, Zhang Meidun. Refractive index measured by optical fiber Michelson interferometer[J]. Acta Optica Sinica, 2000, 20(9): 1294~1296

薛晖, 沈伟东, 顾培夫, 罗震岳, 刘旭, 章岳光. 基于白光干涉的光学薄膜物理厚度测量方法[J]. 光学学报, 2009, 29(7): 1877. Xue Hui, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, Zhang Yueguang. Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry[J]. Acta Optica Sinica, 2009, 29(7): 1877.

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