红外跟踪系统中非球面硅透镜加工技术研究

马放; 付秀华; 贾宗合; 谢影; 唐昊龙

doi:doi:10.5768/jao201233.0405001

应用光学, 2012, 33 (4): 784, 网络出版: 2012-09-12

红外跟踪系统中非球面硅透镜加工技术研究

Processing technology of aspheric silicon lens in IR tracking system

论文大纲

马放 ^*付秀华贾宗合谢影唐昊龙

作者单位

长春理工大学光电工程学院，吉林长春 130022

非球面单晶硅修正抛光面形精度表面光洁度 aspheric single-crystal silicon corrective polishing surface accuracy surface smoothness

摘要

随着军用光学仪器的飞速发展，红外光学材料单晶硅广泛应用于红外光学元件和半导体行业，为了满足精密仪器对光学系统的要求，对光学元件的面型精度要求越来越高。针对红外跟踪系统中对高精度单晶硅透镜的加工技术要求，以Ф26 mm的单晶硅透镜为例，通过多次反复研磨修抛和检测分析，并不断优化工艺参数，设计了特殊的夹具，解决了单晶硅表面光洁度问题以及中心偏差难以控制的加工技术难题，并实现了批量生产。经检测，单晶硅非球面面形精度达到0.2 μm，表面光洁度达到Ⅲ级以上，中心偏差在1 μm以内，各项参数均满足了红外跟踪系统的要求。

Abstract

With the rapid development of military optical instruments, IR optical materials have been widely used in IR optical elements and semiconductor industry, especially single-crystal silicon. To meet the precision instruments requirement for the optical system, the surface figure of the optical components has been increasingly demanded. Aiming at the processing technology requirement of high-precision silicon lens in the IR tracking system, taking a Ф26mm silicon lens as an example, by repeatedly grinding, repair/polishing, testing analysis, continuous optimization of the process parameters and designing a special fixture, this paper solved the problem of the silicon surface smoothness and the difficult control of the center deviation, and achieved mass production. After testing, the precision of the single-crystal silicon aspheric surface figure got 0.2μm, the surface smoothness achieved above the grade Ⅲ and the center deviation was less than 1μm. All the parameters met the requirements of the infrared tracking system.

参考文献

[1] 薛栋林, 张忠玉, 张学军. 一种中小口径非球面元件数控抛光技术［J］. 光学精密工程, 2005, 13(2): 198-203.

XUE Dong-lin, ZHANG Zhong-yu, ZHANG Xue-jun. Computer controlled polishing technology for middle or small aspheric lens［J］. Optics and Precision Engineering, 2005, 13(2): 198-203. (in Chinese with an English abstract)

[2] 魏昕, 杜宏伟, 袁慧, 等. 晶片材料的超精密加工技术现状［J］. 组合机床与自动化加工技术, 2004(3): 77-78.

WEI Xin, DU Hong-wei, YUAN Hui, et al. Crystal material status of ultra-precision processing technology［J］. Machine Tool and Automatic Manufacturing Technique, 2004(3): 77-78. (in Chinese with an English abstract)

[3] 成清校. 单晶硅片超精密磨削减薄技术实验研究［D］. 大连: 大连理工大学, 2009.

CHENG Qing-xiao. Experimental research on ultra-precision grinding technology for silicon wafer thinning［D］. Dalian: Dalian University of Technology, 2009. (in Chinese)

[4] 朱新文, 江东亮, 谭寿洪, 等. 氧化铝粉在硅溶胶中分散行为的研究［J］. 硅酸盐学报, 2001, 29(3): 263-264.

ZHU Xin-wen, JIANG Dong-liang, TAN Shou-hong, et al. The technology of the Al power in the dispersion behavior of silica［J］. Journal of the Chinese Ceramic Society, 2001, 29(3): 263-264. (in Chinese with an English abstract)

[5] 倪颖, 李建强, 王毅, 等. 一种高效率小口径非球面数控抛光方法［J］. 光学技术, 2008, 34(1): 33-35.

NI Ying, LI Jian-qiang, WANG Yi, et al. An efficient method of computer controlled polishing for small aspheric lens［J］. Optical Technique, 2008, 34(1): 33-35. (in Chinese with an English abstract)

[6] CUMBO M J, FAIRHURST D, JACOBS S D, et al. Slurry particle size evolution during the polishing of optical glass［J］. Applied Optics, 1995, 34(19): 3713-3755.

[7] 韩荣久, 孙恒德, 徐德全. 单晶硅片的低温抛光技术［J］. 光学精密工程, 1998, 6(5): 105-106.

HAN Rong-jiu, SUN Heng-de, XU De-quan. The low-temperature polishing technology of the single-crystal silicon［J］. Optics and Precision Engineering, 1998, 6(5): 105-106. (in Chinese with an English abstract)

[8] 牛海燕, 张学军. Ф124 mm口径碳化硅质非球面镜面数控研抛技术研究［J］. 光学精密工程, 2006, 14(4): 541-542.

NIU Hai-yan, ZHANG Xue-jun. Research on computer controlled polishing technology of 124 mm aspheric reaction-burned silicon carbide mirror［J］. Optics and Precision Engineering, 2006, 14(4): 541-542. (in Chinese with an English abstract)

[9] 徐清兰, 伍凡, 吴时彬, 等. 单晶硅镜面超光滑表面工艺技术研究［J］. 光电工程, 2003, 30(5): 70-71.

XU Qing-lan, WU Fan, WU Shi-bin, et al. Study on technologies and techniques for processing super smooth surface of single-crystal silicon［J］. Opto-Electronic Engineering, 2003, 30(5): 70-71. (in Chinese with an English abstract)

[10] 王松伟, 姚合宝, 蒋军彪. 一种新型古典抛光工艺的技术研究［J］. 航空精密制造技术, 2007, 43(2): 19-20.

WANG Song-wei, YAO He-bao, JIANG Jun-biao. New method of the classical polishing technologies［J］. Aviation Precision Manufacturing Technology, 2007, 43(2): 19-20. (in Chinese with an English abstract)

马放, 付秀华, 贾宗合, 谢影, 唐昊龙. 红外跟踪系统中非球面硅透镜加工技术研究[J]. 应用光学, 2012, 33(4): 784. MA Fang, FU Xiu-hua, JIA Zong-he, XIE Ying, TANG Hao-long. Processing technology of aspheric silicon lens in IR tracking system[J]. Journal of Applied Optics, 2012, 33(4): 784.

红外跟踪系统中非球面硅透镜加工技术研究

关于本站 Cookie 的使用提示

全站搜索

红外跟踪系统中非球面硅透镜加工技术研究

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索