光学学报, 2020, 40 (2): 0216001, 网络出版: 2020-01-02 复制并引用该论文  本文已被引 11 次  被引通知

图 & 表

图 1. 激光扫描共聚焦显微镜成像原理图。(a)装置原理;(b)针孔结构;(c)横向与纵向扫描

Fig. 1. Imaging principle of laser scanning confocal microscope. (a) Device principle; (b) pinhole structure; (c) horizontal and vertical scanning

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图 2. 激光扫描共聚焦显微镜检测石英的两种模式。(a)散射模式;(b)荧光模式

Fig. 2. Two modes of silica detected by laser scanning confocal microscope. (a) Scattering mode; (b) fluorescence mode

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图 3. 典型共聚焦显微镜采集到的亚表面缺陷。 (a)麻点缺陷;(b)凹坑缺陷

Fig. 3. Typical subsurface defects collected by confocal microscope. (a) Pitting defect; (b) pit defect

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图 4. 采用缺陷增强算法对图3(b)进行处理后的效果。(a)增强处理后的图像;(b)聚合处理后的图像

Fig. 4. Processing effects of Fig. 3(b) by using defect enhancement algorithm. (a) Enhanced image; (b) aggregated image

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图 5. 双阈值聚合算法的原理。(a)原始图像;(b)处理后的图像

Fig. 5. Principle of double-threshold aggregation algorithm. (a) Original image; (b) processed image

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图 6. 基于八叉树算法的改进MC算法的原理。(a)体数据的建立;(b)八叉树分割

Fig. 6. Principle of improved MC algorithm based on octree algorithm. (a) Establishment of volume data; (b) octree segmentation

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图 7. 三维重建算法流程图

Fig. 7. Flow chart of three-dimensional reconstruction algorithm

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图 8. 凹坑缺陷仿真重建。(a)仿真缺陷;(b)重建的仿真缺陷;(c)重建残差

Fig. 8. Reconstruction of pit defect in simulation. (a) Simulated defect; (b) reconstructed defect in simulation; (c) residual of reconstruction

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图 9. 仿真得到的层析图像。(a)仿真得到的缺陷的横截面;(b)仿真得到的共聚焦层析图像

Fig. 9. Tomography image obtained from simulation. (a) Cross-section of defect from simulation; (b) confocal tomography image obtained from simulation

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图 10. 三种算法重建后点云的还原比例

Fig. 10. Restoration ratio of point cloud after reconstruction by three different algorithms

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图 11. 亚表面缺陷的检测结果。(a)划痕缺陷;(b)微裂纹缺陷;(c)凹坑缺陷

Fig. 11. Detection results of subsurface defects. (a) Scratch defect; (b) microcrack defect; (c) pit defect

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图 12. 子孔径扫描图像

Fig. 12. Subaperture scanning images

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图 13. 亚表面缺陷的重建结果。(a)(b)划痕缺陷的重建结果;(c)(d)微裂纹缺陷的重建结果;(e)(f)凹坑缺陷的重建结果

Fig. 13. Reconstruction results of subsurface defects. (a)(b) Reconstruction results of scratch defects; (c)(d) reconstruction results of microcrack defects; (e)(f) reconstruction results of pit defects

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图 14. 熔融石英亚表面缺陷破坏性检测结果。(a)凹坑缺陷刻蚀检测结果^[17];(b)抛光残留亚表面缺陷^[18];(c)划痕缺陷^[19];(d)凹坑缺陷^[20]

Fig. 14. Destructive test results of subsurface defects of fused silica. (a) Etching test results of pit defects^[17]; (b) polishing-residual subsurface defects^[18]; (c) scratch defects^[19]; (d) pit defects^[20]

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表 1三种算法的运行时间与占用空间

Table1. Running time and occupied memory spaces of three different algorithms

Number of voxels Average time /ms Memory space consumption /MB Contour Filter Original MC Improved MC Contour Filter Original MC Improved MC 103 0.5 0.4 0.4 0.01 0.01 0.01 503 70 51 45 2.1 3.1 1.3 1003 312 356 286 101 140 32 10002×100 19312 28632 10832 752 900 562

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表 2实验样品中缺陷的体积分布

Table2. Defect volume distributions of experimental samples

Defect size /μm3 Number of defects Total volume /μm3 Volume ratio (0--50 μm in depth) /% 0--100 13 556 0.002 >100--200 7 1123 0.003 >200--300 21 5433 0.012 >300--400 24 8512 0.025 >400 6 3362 0.010

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张健浦, 孙焕宇, 王狮凌, 黄进, 周晓燕, 王凤蕊, 刘红婕, 刘东. 熔融石英光学元件亚表面缺陷三维重构技术[J]. 光学学报, 2020, 40(2): 0216001. Jianpu Zhang, Huanyu Sun, Shiling Wang, Jin Huang, Xiaoyan Zhou, Fengrui Wang, Hongjie Liu, Dong Liu. Three-Dimensional Reconstruction Technology of Subsurface Defects in Fused Silica Optical Components[J]. Acta Optica Sinica, 2020, 40(2): 0216001.