光子学报, 2016, 45 (9): 0912001, 网络出版: 2016-10-19   

环形子孔径拼接检测的中心偏移误差补偿

Compensation for Center Offset Error in Annular Subaperture Stitching Interferometry
作者单位
西安交通大学 机械制造系统工程国家重点实验室, 西安 710049
摘要
为了减小非球面环形子孔径拼接测量时的中心偏移误差, 根据检测原理及几何关系, 分析了中心偏移误差在面形测量中的作用机理, 推导了中心偏移误差模型, 并在此基础上提出了一种基于二维像素矩阵的中心偏移误差补偿方法.该方法可以有效地得到初始面形测量数据的中心偏移量, 在拼接之前减小由中心偏移误差引起的波前偏差的剔除误差, 同时减小各环形子孔径中心之间的偏差.利用Zygo干涉仪进行了非球面环形子孔径拼接的中心偏移误差补偿实验, 与零位检测结果相比, 峰谷值残差为-0.015λ, 均方根残差为0.003λ, 表明该补偿方法大大减小了面形测量误差, 提高了环形子孔径拼接的测量精度.
Abstract
In order to reduce the center offset error in aspheric surface testing by annular subaperture stitching interferometry, the mechanism of action of center deviation error in the surface shape measurement was analyzed, and the error model based on the testing principle and geometrical relationship was established. A compensation method for the center offset error based on two-dimensional matrices of pixel was proposed. The method is effective for searching the center offset of the initial surface shape measurement data and reducing the eliminate error of the wavefront error caused by the center offset error, and the error among the centers of annular subapertures can also be decreased. The error compensation experiment for the annular subaperture stitching interferometry was carried out with Zygo interferometer. The errors of peak to valley value and root mean square are -0.015λ and 0.003λ respectively compared with the null aspheric surface testing result. The experiment results show that the proposed method greatly reduces the surface measurement errors and improves the measurement precision of annular subaperture stitching interferometry.
参考文献

[1] 师途, 杨甬英, 张磊, 等. 非球面光学元件的面形检测技术[J].中国光学, 2014, 7(1): 26-46.

    SHI Tu, YANG Yong-ying, ZHANG Lei, et al. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1): 26-46.

[2] 侯溪, 伍凡, 杨力, 等. 子孔径拼接干涉测试技术现状及发展趋势[J]. 光学与光电技术, 2005, 3(3): 50-53.

    HOU Xi, WU Fan, YANG Li, et al. Status and development trend of sub-aperture stitching interferometric testing technique[J]. Optics & Optoelectronic Technology, 2005, 3(3): 50-53.

[3] HOU Xi, WU Fan, WU Shi-bin, et al. Annular sub-aperture interferometric testing technique for large aspheric surfaces[C]. SPIE, 2005, 5638: 992-997.

[4] 王孝坤, 张学军, 王丽辉, 等. 环形子孔径拼接干涉检测非球面的数学模型和仿真研究[J]. 光学精密工程, 2006, 14(4): 527-532.

    WANG Xiao-kun, ZHANG Xue-jun, WANG Li-hui, et al. Mathematical model and simulation for testing aspheric surface by annular subaperture stitching interferometry[J]. Optics and Precision Engineering, 2006, 14(4): 527-532.

[5] HOU Xi, WU Fan, YANG Li, et al.Stiching algorithm for annular subaperture interferometry[J]. Chinese Optics Letters, 2006, 4(4): 211-214.

[6] 张蓉竹, 杨春林, 许乔, 等. 子孔径拼接干涉检测中去倾斜处理技术[J]. 强激光与粒子束, 2004, 16(7): 879-882.

    ZHANG Rong-zhu, YANG Chun-lin, XU Qiao, et al. Anti-tilting technology of sub-aperture stitching interferograms[J]. High Power Laser and Particle Beams, 2004, 16(7): 879-882.

[7] 侯溪, 伍凡, 吴时彬, 等. 使用环形子孔径拼接检测大口径非球面镜[J]. 光学技术, 2005, 31(4): 506-508.

    HOU Xi, WU Fan, WU Shi-bin, et al.Testing the large aspheric mirror using annular subapertures[J]. Optical Technique, 2005, 31(4): 506-508.

[8] 王孝坤, 郑立功, 张学军, 等. 子孔径拼接干涉检测离轴非球面研究[J]. 光子学报, 2011, 40(1): 92-97.

    WANG Xiao-kun, ZHENG Li-gong, ZHANG Xue-jun, et al. Testing an off-axis asphere by subaperture stitching interferometry[J]. Acta Photonica Sinica, 2011, 40(1): 92-97.

[9] 田爱玲, 吴世霞, 刘丙才, 等. 基于权重的子孔径拼接优化算法研究[J]. 光子学报, 2013, 42(8): 943-949.

    TIAN Ai-ling, WU Shi-xia, LIU Bing-cai, et al. Global optimization algorithm of sub-aperture stitching weight coefficients[J]. Acta Photonica Sinica, 2013, 42(8): 943-949.

[10] WEN Yong-fu, CHENG Hao-bo, TAM Hon-yuen, et al. Modified stitching algorithm for annular subaperture stitching interferometry for aspheric surfaces[J]. Applied Optics, 2013, 52(23): 5686-5694.

[11] 王道档, 杨甬英, 陈晓钰, 等. 高精度球面检测中调整误差的精确校正[J]. 纳米技术与精密工程, 2013, 11(1): 20-26.

    WANG Dao-dang, YANG Yong-ying, CHEN Xiao-yu, et al. Accurate calibration of misalignment in high-precision spherical surface testing[J]. Nanotechnology and Precision Engineering, 2013, 11(1): 20-26.

[12] 乔玉晶, 谭久彬, 王伟波. 非球面拼接测量中偏置误差修正模型[J]. 光电子·激光, 2008, 19(11): 1497-1501.

    QIAO Yu-jing, TAN Jiu-bin, WANG Wei-bo. Revising model for the bias errors correcting during stitching measure aspheric surface[J]. Journal of Optoelectronics·Laser, 2008, 19(11): 1497-1501.

[13] 王孝坤. 子孔径拼接检测非球面时调整误差的补偿[J]. 中国光学, 2013, 6(1): 89-95.

    WANG Xiao-kun. Compesation of misalignment error on testing aspheric surface by surface by subaperture stitching interferometry[J]. Chinese Optics, 2013, 6(1): 89-95.

[14] 张敏, 王立鹏, 隋永新, 等. 环形子孔径拼接检测中机械误差的分离[J]. 应用光学, 2013, 34(5): 825-830.

    ZHANG Min, WANG Li-peng, SUI Yong-xin, et al. Separation of mechanical error in annular subaperture stitching interferometry[J]. Journal of Applied Optics, 2013, 34(5): 825-830.

[15] ZHANG Lei, TIAN Chao, LIU Dong, et al. Non-null annular subaperture stitching interferometry for steep aspheric measurement[J]. Applied Optics, 2014, 53(25): 5755-5762.

[16] 张磊, 田超, 刘东, 等. 非球面非零位环形子孔径拼接干涉检测技术[J]. 光学学报, 2014, 34(8): 0812003.

    ZHANG Lei, TIAN Chao, LIU Dong, et al. Non-null annular subaperture stitching interferometry for aspheric test[J]. Acta Optical Sinica, 2014, 34(8): 0812003.

[17] 侯溪, 伍凡, 杨力, 等. 环形子孔径检测技术中测量数据的准确提取方法[J]. 光电工程, 2006, 33(8): 113-131.

    HOU Xi, WU Fan, YANG Li, et al. Accurate data extraction method for annular subaperture stitching technique[J]. Opto-Electronic Engineering, 2006, 33(8): 113-131.

李兵, 刘晓, 康晓清, 高芬. 环形子孔径拼接检测的中心偏移误差补偿[J]. 光子学报, 2016, 45(9): 0912001. LI Bing, LIU Xiao, KANG Xiao-qing, GAO Fen. Compensation for Center Offset Error in Annular Subaperture Stitching Interferometry[J]. ACTA PHOTONICA SINICA, 2016, 45(9): 0912001.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!