氮气流量对磁控溅射制备类金刚石薄膜性能的影响
王洪美, 李玉芳, 沈鸿烈, 翟子豪, 陈洁仪, 杨家乐, 杨艳. 氮气流量对磁控溅射制备类金刚石薄膜性能的影响[J]. 光子学报, 2019, 48(4): 0416003.
WANG Hong-mei, LI Yu-fang, SHEN Hong-lie, ZHAI Zi-hao, CHEN Jie-yi, YANG Jia-le, YANG Yan. Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering[J]. ACTA PHOTONICA SINICA, 2019, 48(4): 0416003.
[1] 惠迎雪. 磁控溅射制备类金刚石薄膜的研究[D]. 西安: 西安工业学院, 2003.
[2] 李铁军, 刘晶儒, 王丽戈,等. 利用脉冲激基分子激光制备大尺寸类金刚石薄膜及其均匀性分析[J]. 光子学报, 1999, 28(12): 1080-1085.
LI Tie-jun, LIU Jing-ru, WANG Li-ge, et al. Preparation of large size diamond like carbon films by pulsed excimer laser and its uniformity analysis[J]. Acta Photonica Sinica, 1999, 28(12): 1080-1085.
[3] POLAKI S R, KUMAR N, MADAPU K, et al. Interpretation of friction and wear in DLC film: role of surface chemistry and test environment[J]. Journal of Physics D, 2016, 49(44): 445302.
[4] 周毅, 汪爱英. 多样品法确定类金刚石薄膜的光学常数与厚度[J]. 光学学报, 2010, 30(8): 2467-2472.
ZHOU Yi, WANG Ai-ying. Determination of optical constant and thickness of diamond like carbon films by multi-sample method[J]. Acta Optica Sinica, 2010, 30(8): 2467-2472.
[5] SUN Y, HUANG X Y, WANG H. Influence of hydrogen content on optical and mechanical performances of diamond-like carbon films on glass substrate[J]. Journal of Materials Engineering & Performance, 2016, 25(4): 1570-1577.
[6] ZHAI Z H, SHEN H L, CHEN J Y, et al. Investigation of substrate temperature and cooling method on the properties of amorphous carbon films by hot-filament CVD with acetylene[J]. Carbon, 2017, 117(3): 322-330.
[7] AISENBERG S, CHABOT R. Ion-beam deposition of thin films of diamond like carbon[J].Journal of Vacuum Science & Technology, 2003, 42(7): 2953-2958.
[8] 杨兵初, 陈海平, 曾礼丽,等. 掺N类金刚石薄膜的制备及微观结构分析[J]. 半导体技术, 2009, 34(8): 770-774.
YANG Bing-chu, CHEN Hai-ping, ZENG Li-li, et al. Preparation and microstructure analysis of N-doped diamond like carbon films[J]. Semiconductor Technology, 2009, 34(8): 770-774.
[9] 胡立琼. 掺氮类金刚石薄膜的制备及其表征[D]. 北京: 北京印刷学院, 2006.
[10] 陈海平. 掺氮类金刚石薄膜的制备及其结构与光电性质研究[D]. 长沙: 中南大学, 2009.
[11] 彭勃, 张艳, 蔺增,等. 类金刚石薄膜的光学性能及应用[C]. 全国真空冶金与表面工程学术会议. 2005.
[12] LAMBERTON R W, ZHAO J F, MAGILL D, et al. A study of ultra-thin film ion beam deposited(IBD) hydrogenated amorphous carbon(a-C: H) using atomic force microscopy(AFM) and transmission electron microscopy(TEM)[J]. Diamond & Related Materials, 1998, 7(7): 1054-1058.
[13] 居建华, 夏义本, 张伟丽,等. 掺氮类金刚石薄膜的微观结构和红外光学性能研究[J]. 应用科学学报, 2001, 19(2): 173-177.
JU Jian-hua, XIA Yi-ben, ZHANG Wei-li, et al. Microstructure and infrared optical properties of nitrogen-doped diamond like carbon films[J]. Journal of Applied Sciences, 2001, 19(2): 173-177.
[14] SON M J, ZHANG T F, JO Y J, et al. Enhanced electrochemical properties of the DLC films with an arc interlayer, nitrogen doping and annealing[J]. Surface & Coatings Technology, 2017, 329: 77-85.
[15] QI M, XIAO J, CHENG Y, et al. Effect of various nitrogen flow ratios on the optical properties of(Hf: N)-DLC films prepared by reactive magnetron sputtering[J]. Aip Advances, 2017, 7(8): 085012.
[16] NAKAO S, SOGA T, SONODA T, et al. Optical and electrical properties of nitrogen-doped diamond-like carbon films prepared by a bipolar-type plasma-based ion implantation[J]. Japanese Journal of Applied Physics, 2012, 51(1): 109-117.
[17] 周祎, 马胜歌, 康光宇,等. 不同掺氮量的类金刚石薄膜的微观结构及其性能研究[J]. 真空科学与技术学报, 2009, 29(z1): 77-80.
ZHOU Yi, MA Sheng-ge, KANG Guang-yu, et al. Microstructure and properties of diamond like carbon films with different nitrogen contents[J]. Chinese Journal of Vacuum Science and Technology, 2009, 29(z1): 77-80.
[18] SCHEIBE H J, DRESCHER D, ALERS P. Raman characterization of amorphous carbon films[J]. Fresenius Journal of Analytical Chemistry, 1995, 353(5-8): 695-697.
[19] DILLON R O, WOOLLAM J A. Use of Raman scattering to investigate disorder and crystallite formation in As-deposited and annealed carbon films[J]. Carbon, 1984, 22(2): 220-220.
[20] LEMOINE P, LIU Z H, QUINN J P. A study of microstructure and nanomechanical properties of silicon incorporated DLC films deposited on silicon substrates[J]. Diamond & Related Materials, 2001, 10(3): 1070-1075.
[21] AHMED S F, MITRA M K, CHATTOPADHYAY K K. Low-macroscopic field emission from silicon incorporated diamond like carbon film synthesized by DC PECVD[J]. Applied Surface Science, 2007, 253(12): 5480-5484.
[22] BOOTKUL D, SUPSERMPOL B, SAENPHINIT N, et al. Nitrogen doping for adhesion improvement of DLC film deposited on Si substrate by Filtered Cathodic Vacuum Arc(FCVA) technique[J]. Applied Surface Science, 2014, 310(8): 284-292.
王洪美, 李玉芳, 沈鸿烈, 翟子豪, 陈洁仪, 杨家乐, 杨艳. 氮气流量对磁控溅射制备类金刚石薄膜性能的影响[J]. 光子学报, 2019, 48(4): 0416003. WANG Hong-mei, LI Yu-fang, SHEN Hong-lie, ZHAI Zi-hao, CHEN Jie-yi, YANG Jia-le, YANG Yan. Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering[J]. ACTA PHOTONICA SINICA, 2019, 48(4): 0416003.