光子学报, 2019, 48 (4): 0416003, 网络出版: 2019-04-28
氮气流量对磁控溅射制备类金刚石薄膜性能的影响
Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering
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王洪美, 李玉芳, 沈鸿烈, 翟子豪, 陈洁仪, 杨家乐, 杨艳. 氮气流量对磁控溅射制备类金刚石薄膜性能的影响[J]. 光子学报, 2019, 48(4): 0416003. WANG Hong-mei, LI Yu-fang, SHEN Hong-lie, ZHAI Zi-hao, CHEN Jie-yi, YANG Jia-le, YANG Yan. Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering[J]. ACTA PHOTONICA SINICA, 2019, 48(4): 0416003.