掩模位置误差对光刻投影物镜畸变的影响
杨旺, 黄玮, 尚红波. 掩模位置误差对光刻投影物镜畸变的影响[J]. 光学 精密工程, 2016, 24(3): 469.
YANG Wang, HUANG Wei, SHANG Hong-bo. Effect of alignment errors of reticle on distortion in lithographic projection lens[J]. Optics and Precision Engineering, 2016, 24(3): 469.
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杨旺, 黄玮, 尚红波. 掩模位置误差对光刻投影物镜畸变的影响[J]. 光学 精密工程, 2016, 24(3): 469. YANG Wang, HUANG Wei, SHANG Hong-bo. Effect of alignment errors of reticle on distortion in lithographic projection lens[J]. Optics and Precision Engineering, 2016, 24(3): 469.
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