光电工程, 2010, 37 (2): 74, 网络出版: 2010-05-28
标准硅球直径测量中的光路对准
Beam Alignment for Diameter Measurement of the Single Crystal Silicon Sphere
图 & 表
康岩辉, 邾继贵, 罗志勇, 叶声华. 标准硅球直径测量中的光路对准[J]. 光电工程, 2010, 37(2): 74. KANG Yan-hui, ZHU Ji-gui, LUO Zhi-yong, YE Sheng-hua. Beam Alignment for Diameter Measurement of the Single Crystal Silicon Sphere[J]. Opto-Electronic Engineering, 2010, 37(2): 74.