强激光与粒子束, 2015, 27 (9): 092011, 网络出版: 2015-11-30   

磁流变抛光去除函数形状动态预测方法

Dynamic prediction of the shape of MRF removal function
作者单位
中国工程物理研究院 机械制造工艺研究所, 四川 绵阳 621900
摘要
提出了一种磁流变抛光去除函数形状的动态预测方法。建立了去除函数形状的演变机制,并根据实际的磁流变抛光应用范围,通过数值计算分析得到了较简单的去除函数形状的演变方法。分析表明,对于实际抛光过程,去除函数长度和宽度的改变量与浸入深度的改变量有很好的线性关系,其决定系数均在95%以上。与实验结果对比,对去除函数的49次预测中,长度预测的相对误差在-4.52%~5.51%之间,宽度预测的相对误差在-7.20%~6.63%之间。
Abstract
The dynamic prediction method is proposed to calculate the shape of magnetorheological finishing (MRF) removal function. After the establishment of transition mechanism of the shape of removal function, numerical analysis is performed to simplify this mechanism and hence resulting in the rapid prediction method for common MRF process configurations. The result indicates that, for most MRF settings, the variations of length and width change linearly with the variation of immersion depth, exhibiting coefficients of determination higher than 95%. Among the 49 prediction results, the relative errors for predictions of length range from -4.52% to 5.51% and the same figure for width predictions fluctuates from -7.2% to 6.63%.
参考文献

[1] Moses E I, Miller G H, Wuest C R. The national ignition facility: enabling fusion ignition for the 21st century[J]. Nucl Fusion, 2004, 44(12):228-238.

[2] Kordonski W I, Golini D, Dumas P, et al. Magnetorheological-suspension-based finishing technology[C]//Proc of SPIE. 1998, 3326: 527-535.

[3] 徐曦,杨李茗,石琦凯,等.磁流变加工对中频误差的影响[J].强激光与粒子束, 2012, 24(7):1695-1699.

    Xu Xi, Yang Liming, Shi Qikai, et al. Effect of magnetorheological finishing on mid-spatial frequency error. High Power Laser and Particle Beams, 2012, 24(7):1695-1699

[4] 颜浩,杨春林,侯晶,等.磁流变加工的连续相位板波前及光强特性[J].强激光与粒子束, 2014, 26:092012.

    Yan Hao, Yang Chunlin, Hou Jing, et al. Wavefront and light intensity characteristics of continuous phase plate fabricated by magnetorheological finishing. High Power Laser and Particle Beams, 2014, 26:092012

[5] Tricard M, Dumas P, Menapace J. Continuous phase plate polishing using magnetorheological finishing[C]//Proc of SPIE. 2008:70620V.

[6] Hu H, Dai Y, Peng X. Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing[J]. Opt Express, 2010, 18(22):973-981.

[7] Arrasmith S R, Kozhinova I A, Gregg L L, et al. Details of the polishing spot in magnetorheological finishing (MRF)[C]//Proc of SPIE. 1999, 3782:92-100.

[8] Kordonski W, Gorodkin S. Material removal in magnetorheological finishing of optics[J]. Applied Optics, 2011, 50(14):1984-1994.

[9] Kordonski W, Golini D, Hogan S, et al. Novel approach in magnetorheological finishing (MRF) system configuration[J]. Optical Fabrication and Testing, 2002, 76:OMA1.

[10] 宋辞.离轴非球面光学零件磁流变抛光关键技术研究[D].长沙:国防科学技术大学, 2012.

    Song Ci. Study on the key techniques of magnetorheological finishing for off-axis aspheric optical elements. Changsha: National University of Defense Technology, 2012

[11] Shorey A B. Mechanisms of material removal in MRF of glass [D]. New York: University of Rochester, 2000.

[12] Tichy J A. Hydrodynamic lubrication theory for the Bingham plastic flow model[J]. J Rheol, 1991, 34:477-495.

[13] 杨航,何建国,黄文,等.磁流变抛光去除函数获取的微分解耦方法[J].强激光与粒子束, 2015, 27:082005.

    Yang Hang, He Jianguo, Huang Wen, et al. Differential decoupling method employed in MRF spotting process. High Power Laser and Particle Beams, 2015, 27:082005

[14] Gertzos K P, Nikolakopoulos P G, Papadopoulos C A. CFD analysis of journal bearing hydrodynamic lubrication by Bingham lubricant[J]. Tribology International, 2008, 41:1190-1204.

[15] Westover S, Hall C, DeMarco M. Improved MRFR spot characterization with QISTM metrology[C]//Proc of SPIE. 2013:888421.

[16] Schinhaerl M, Rascher R, Stamp R, et al. Filter algorithm for influence functions in the computer controlled polishing of high-quality optical lenses[J]. International Journal of Machine Tools & Manufacture, 2006, 47:107-111.

[17] Schinhaerl M, Smith G, Stamp R, et al. Mathematical modeling of influence functions in computer-controlled polishing: Part Ⅰ[J]. Applied Mathematical Modeling, 2008, 32(12):2888-2906.

杨航, 何建国, 黄文, 张云飞. 磁流变抛光去除函数形状动态预测方法[J]. 强激光与粒子束, 2015, 27(9): 092011. Yang Hang, He Jianguo, Huang Wen, Zhang Yunfei. Dynamic prediction of the shape of MRF removal function[J]. High Power Laser and Particle Beams, 2015, 27(9): 092011.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!