斜入射微结构高度误差的优化设计
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杨亮亮, 刘成林, 张志海, 唐健. 斜入射微结构高度误差的优化设计[J]. 激光与光电子学进展, 2017, 54(6): 060501. Yang Liangliang, Liu Chenglin, Zhang Zhihai, Tang Jian. Optimal Design of Depth-Scaling Error with Oblique Incidence[J]. Laser & Optoelectronics Progress, 2017, 54(6): 060501.