红外与激光工程, 2018, 47 (3): 0321004, 网络出版: 2018-04-26 复制并引用该论文  本文已被引 3 次  被引通知

王利栓, 杨霄, 刘丹丹, 姜承慧, 刘华松, 季一勤, 张锋, 樊荣伟, 陈德应. 离子束溅射氧化钽薄膜光学特性的热处理效应[J]. 红外与激光工程, 2018, 47(3): 0321004. Wang Lishuan, Yang Xiao, Liu Dandan, Jiang Chenghui, Liu Huasong, Ji Yiqin, Zhang Feng, Fan Rongwei, Chen Deying. Annealing effect of the optical properties of tantalum oxide thin film prepared by ion beam sputtering[J]. Infrared and Laser Engineering, 2018, 47(3): 0321004.