中国激光, 2016, 43 (11): 1101003, 网络出版: 2016-11-10
激光阶梯刻蚀法制备45°微反射镜及垂直耦合研究
Research on Fabrication and Vertical Coupling of 45° Micromirror with Laser Stepped Ablation Method
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邓传鲁, 宋志强, 庞拂飞, 王建辉, 王廷云. 激光阶梯刻蚀法制备45°微反射镜及垂直耦合研究[J]. 中国激光, 2016, 43(11): 1101003. Deng Chuanlu, Song Zhiqiang, Pang Fufei, Wang Jianhui, Wang Tingyun. Research on Fabrication and Vertical Coupling of 45° Micromirror with Laser Stepped Ablation Method[J]. Chinese Journal of Lasers, 2016, 43(11): 1101003.