精密干涉测量中余弦依赖算法的误差研究
[1] Wang Liwu, Su Xianyu, Zhou Lipin. Correction algorithm of random phase shifting errors in phase measuring profilometry[J]. Acta Optica Sinica, 2003, 24(5): 614~618 (in Chinese)
王立无,苏显渝,周利兵. 相位测量轮廓术中随机相移误差的校正算法[J]. 光学学报, 2003, 24(5): 614~618
[3] Jiang Zhenyu, Niao Hong, Zhang Qingchuan et al.. Weighted phase unwrapping based on analysis of intensity modulation for phase-shifting interferometry[J]. Acta Optica Sinica, 2003, 24(8): 1032~1038 (in Chinese)
蒋震宇,缪泓,张青川 等. 调制度分析在等步长相移法相位展开中的应用[J]. 光学学报, 2003, 24(8): 1032~1038
[5] . Generalized phase-shifting interferometery[J]. J. Opt. Soc. Am. (A), 1991, 8(5): 822-827.
[6] . V. Dorrio, J. Blanco-Garcia, C. Lopez et al.. Phase error calculation in a Fizeau interferometer by Fourier expansion of the intensity profile[J]. Appl. Opt., 1996, 35(1): 61-64.
[7] . Design of algorithms for phase measurements by the use of phase stepping[J]. Appl. Opt., 1996, 35(1): 51-60.
[8] . Hariharan, B. F. Oreb, T. Eiju. Digital phase-stepping interferometry: a simple error-compensating phase calculation[J]. Appl. Opt., 1987, 26(13): 2504-2505.
[9] . Bonsch, H. Bohme. Phase-determination of Fizeau interferences by phase-shifting interferometry[J]. Optik, 1989, 82(4): 161-164.
[10] . Vikram. Exact phase error effect on contrast measurement in four-step phase-shifting interferometry[J]. Optik, 2000, 111(12): 563-564.
罗志勇, 杨丽峰, 陈允昌. 精密干涉测量中余弦依赖算法的误差研究[J]. 光学学报, 2005, 25(12): 1629. 罗志勇, 杨丽峰, 陈允昌. Error Evaluation of Cosine Dependent Algorithm in Precision Interference Measurement[J]. Acta Optica Sinica, 2005, 25(12): 1629.