采用数字微镜的共焦显微镜的研制

张运波; 侯文玫; 郑继红; 官志超

doi:doi:10.3969/j.issn.1003-501x.2011.06.011

光电工程, 2011, 38 (6): 65, 网络出版: 2011-07-01

采用数字微镜的共焦显微镜的研制

The Development of Parallel Confocal Microscope Employing Digital Micromirror Device

论文大纲

张运波 ^*侯文玫郑继红官志超

作者单位

上海理工大学光电信息与计算机工程学院, 上海 200093

共焦检测数字微镜器件虚拟针孔阵列并行扫描 confocal inspection digital micromirror device virtual pinhole array parallel scanning

摘要

研究了基于数字微镜器件 (DMD)的多路并行共焦显微镜。利用 DMD产生特定的图案对光源进行调制, 形成多路并行共焦检测工作模式, 其作用相当于虚拟针孔阵列, 可以代替现有的并行扫描方式。采用 DMD作为共焦系统的并行横向扫描方式, 在不损失分辨率的前提下, 大大提高了测量速度。系统中虚拟针孔的大小和周期等关键参数具有程序可控制性, 能够根据不同的要求对样品进行测量。解决了分光棱镜内表面反射作用对共焦成像造成的干扰问题。设计了 DMD横向扫描策略。对样机进行了测试实验, 取得了系统的深度响应曲线, 并且成功还原了被测物表面的微结构。

Abstract

A multi-point parallel confocal microscope is designed and developed based on Digital Micromirror Device (DMD). Operated with specific patterns, the DMD can modulate light source into multiple beams. The DMD functions as virtual pinhole array and takes the place of traditional pinholes to realize the lateral scanning technique. According to the research, the DMD based confocal system can achieve parallel scanning in the case of ensuring axial resolution. In that way, it can not only increase the inspecting speed, but also programmablely control the key parameters of the system, such as pinhole size and frequency. The inner surface reflection interference of the beamsplitter prism was eliminated, and a transverse scan strategy was designed. By carrying out experimental measurement on the prototype, depth response curve was acquired and the three-dimensional profile of the target object was successfully restored.

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张运波, 侯文玫, 郑继红, 官志超. 采用数字微镜的共焦显微镜的研制[J]. 光电工程, 2011, 38(6): 65. ZHANG Yun-bo, HOU Wen-mei, ZHENG Ji-hong, GUAN Zhi-chao. The Development of Parallel Confocal Microscope Employing Digital Micromirror Device[J]. Opto-Electronic Engineering, 2011, 38(6): 65.

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