环境气压对脉冲激光烧蚀沉积纳米Si薄膜表面粗糙度的影响
王英龙, 张荣梅, 傅广生, 彭英才, 孙运涛. 环境气压对脉冲激光烧蚀沉积纳米Si薄膜表面粗糙度的影响[J]. 中国激光, 2004, 31(6): 698.
王英龙, 张荣梅, 傅广生, 彭英才, 孙运涛. Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2004, 31(6): 698.
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王英龙, 张荣梅, 傅广生, 彭英才, 孙运涛. 环境气压对脉冲激光烧蚀沉积纳米Si薄膜表面粗糙度的影响[J]. 中国激光, 2004, 31(6): 698. 王英龙, 张荣梅, 傅广生, 彭英才, 孙运涛. Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2004, 31(6): 698.
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