中国激光, 2004, 31 (6): 698, 网络出版: 2006-06-12
环境气压对脉冲激光烧蚀沉积纳米Si薄膜表面粗糙度的影响
Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition
图 & 表
王英龙, 张荣梅, 傅广生, 彭英才, 孙运涛. 环境气压对脉冲激光烧蚀沉积纳米Si薄膜表面粗糙度的影响[J]. 中国激光, 2004, 31(6): 698. 王英龙, 张荣梅, 傅广生, 彭英才, 孙运涛. Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2004, 31(6): 698.