光学学报, 2016, 36 (1): 0105003, 网络出版: 2015-12-31
基于复合光栅的大范围高精度对准方法
High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings
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司新春, 唐燕, 胡松, 刘俊伯, 程依光, 胡淘, 周毅, 邓钦元. 基于复合光栅的大范围高精度对准方法[J]. 光学学报, 2016, 36(1): 0105003.
Si Xinchun, Tang Yan, Hu Song, Liu Junbo, Cheng Yiguang, Hu Tao, Zhou Yi, Deng Qinyuan. High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings[J]. Acta Optica Sinica, 2016, 36(1): 0105003.
司新春, 唐燕, 胡松, 刘俊伯, 程依光, 胡淘, 周毅, 邓钦元. 基于复合光栅的大范围高精度对准方法[J]. 光学学报, 2016, 36(1): 0105003. Si Xinchun, Tang Yan, Hu Song, Liu Junbo, Cheng Yiguang, Hu Tao, Zhou Yi, Deng Qinyuan. High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings[J]. Acta Optica Sinica, 2016, 36(1): 0105003.
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