光学学报, 2012, 32 (8): 0831001, 网络出版: 2012-06-25   

利用透射光谱与X射线反射谱精确测量溶胶凝胶TiO2薄膜厚度和光学常数

Determination of Thickness and Optical Constants of Sol-Gel Derived TiO2 Films by Combined Analysis of Transmittance and X-Ray Reflectivity Spectra
作者单位
1 中国科学院山西煤炭化学研究所煤转化国家重点实验室, 山西 太原 030001
2 中国科学院研究生院, 北京 100049
3 中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
摘要
在洁净K9玻璃基底上沉积TiO2薄膜,将透射光谱和X射线反射光谱相结合分析获得膜层的厚度和光学常数。X射线反射谱拟合能精确得到膜层的厚度、电子密度及表面和界面粗糙度,其中膜层厚度的数值为透射光谱的分析提供了重要参考。基于Forouhi-Bloomer色散模型拟合膜层透射光谱,得到薄膜折射率和消光系数,理论曲线和实验曲线吻合良好。对于同一样品,两种光谱拟合分析得到的厚度数值非常接近,差值最大为4.9 nm,说明两种方法的结合能够提高光学分析结果的可靠性。
Abstract
TiO2 films deposited on well clean K9 glass substrates are investigated for their thickness and optical constants by transmittance and X-ray reflectivity (XRR) measurements. XRR provides highly accurate results on film electron density, thickness and interface roughness. The film thickness from XRR is used as an anitial value to accelerate the evaluation of the transmittance data. With the help of Forouhi-Bloomer dispersion model, the calculated transmittance curves fit the experimental results well. For the same sample, the film thickness values from the two methods are very close and the maximum difference is 4.9 nm, which indicates that the combination of XRR and transmittance spectra can improve the reliability of the optical characterization.
参考文献

[1] Z. Wang, U. Helmersson, P. O. Kall. Optical properties of anatase TiO2 thin films prepared by aqueous sol-gel process at low temperature[J]. Thin Solid Films, 2002, 405(1-2): 50~54

[2] Y. Sheng, L. Liang, Y. Xu et al.. Low-temperature deposition of the high-performance anatase-titania optical films via a modified sol-gel route[J]. Opt. Mater., 2008, 30(8): 1310~1315

[3] S. T. Sundari, N. C. Raut, T. Mathews et al.. Ellipsometric studies on TiO2 thin films synthesized by spray pyrolysis technique[J]. Appl. Surf. Sci., 2011, 257(17): 7399~7404

[4] Y. Wang, E. Watkins, J. Ilavsky et al.. Water-barrier properties of mixed bis trimethoxysilylpropyl amine and vinyltriacetoxysilane films[J]. J. Phys. Chem. B, 2007, 111(25): 7041~7051

[5] K. A. Ritley, K. P. Just, F. Schreiber et al.. X-ray reflectivity study of solution-deposited ZrO2 thin films on self-assembled monolayers: growth, interface properties, and thermal densification[J]. J. Mater. Res., 2000, 15(12): 2706~2713

[6] 易葵, 邵建达, 范正修. 表面粗糙度对软X射线多层膜光学特性的影响[J]. 光学学报, 1999, 19(6): 800~804

    Yi Kui, Shao Jianda, Fan Zhengxiu. Effects of roughness on characterization of soft X-ray multilayer coating[J]. Acta Optica Sinica, 1999, 19(6): 800~804

[7] 周毅, 汪爱英. 多样品法确定类金刚石薄膜的光学常数与厚度[J]. 光学学报, 2010, 30(8): 2468~2472

    Zhou Yi, Wang Aiying. Determination of optical constants and thickness of diamond-like carbon films by a multiple sample method[J]. Acta Optica Sinica, 2010, 30(8): 2468~2472

[8] R. Swanepoel. Determination of the thickness and optical-constants of amorphous-silicon[J]. J. Phys. E: Sci. Instrum., 1983, 16(12): 1214~1222

[9] 郭春, 林大伟, 张云洞 等. 光度法确定LaF3薄膜光学常数[J]. 光学学报, 2011, 31(7): 0731001

    Guo Chun, Lin Dawei, Zhang Yundong et al.. Determination of optical constants of LaF3 films from spectrophotometric measurements[J]. Acta Optica Sinica, 2011, 31(7) : 0731001

[10] P. Chrysicopoulou, D. Davazoglou, C. Trapalis et al.. Optical properties of very thin (<100 nm) sol-gel TiO2 films[J]. Thin Solid Films, 1998, 323(1-2): 188~193

[11] I. Chambouleyron, J. M. Martínez, A. C. Moretti et al.. Retrieval of optical constants and thickness of thin films from transmission spectra[J]. Appl. Opt., 1997, 36(31): 8238~8247

[12] A. R. Forouhi, I. Bloomer. Optical dispersion-relations for amorphous semiconductors and amorphous dielectrics[J]. Phys. Rev. B, 1986, 34(10): 7018~7026

[13] A. R. Forouhi, I. Bloomer. Optical-properties of crystalline semiconductors and dielectrics[J]. Phys. Rev. B, 1988, 38(3): 1865~1874

[14] L. G. Parratt. Surface studies of solids by total reflection of X-rays[J]. Phys. Rev., 1954, 95(2): 359~369

[15] S. Phadke, J. D. Sorge, S. Hachtmann et al.. Broad band optical characterization of sol-gel TiO2 thin film microstructure evolution with temperature[J]. Thin Solid Films, 2010, 518(19): 5467~5470

[16] D. Davazoglou. Optical absorption threshold of low pressure chemically vapor deposited silicon oxynitride films from SiCl2H2-NH3-N2O mixtures[J]. Thin Solid Films, 2003, 437(1): 266~271

[17] D. Davazoglou. Optical properties of SnO2 thin films grown by atmospheric pressure chemical vapour deposition oxidizing SnCl4[J]. Thin Solid Films, 1997, 302(1): 204~213

[18] C. L. Mak, B. Lai, K. H. Wong et al.. Spectroellipsometric study of sol-gel derived potassium sodium strontium barium niobate films[J]. J. Appl. Phys., 2001, 89(8): 4491~4496

[19] O. Stenzel. The Physics of Thin Film Optical Spectra: An Introdution [M]. Berlin: Springer, 2005. 125~140

[20] D. Davazoglou. Determination of optical dispersion and film thickness of semiconducting disordered layers by transmission measurements: application for chemically vapor deposited Si and SnO2 film[J]. Appl. Phys. Lett., 1997, 70(2): 246~248

[21] 沈伟东, 刘旭, 朱勇 等. 用透射率测试曲线确定半导体薄膜的光学常数和厚度[J]. 半导体学报, 2005, 26(2): 335~340

    Shen Weidong, Liu Xu, Zhu Yong et al. Determination of optical constants and thickness of semiconductor thin films by transmission measurement[J]. Chinese J. Semiconductors, 2005, 26(2): 335~340

[22] S. Dourdain, J.-F. Bardeau, M. Colas et al.. Determination by X-ray reflectivity and small angle X-ray scattering of the porous properties of mesoporous silica thin films[J]. Appl. Phys. Lett., 2005, 86(11): 113108

[23] M. J. Henderson, K. Zimny, J. L. Blin et al.. TiO2 thin films self-assembled with a partly fluorinated surfactant template[J]. Langmuir, 2010, 26(2): 1124~1129

[24] S. Vives, C. Meunier. Densification of amorphous sol-gel TiO2 films: an X-ray reflectometry study[J]. Thin Solid Films, 2010, 518(14): 3748~3753

[25] N. Martin, C. Rousselot, D. Rondot et al.. Microstructure modification of amorphous titanium oxide thin films during annealing treatment[J]. Thin Solid Films, 1997, 300(1-2): 113~121

[26] T. Giannakopoulou, N.Todorova, P. Osiceanu et al.. Description of TiO2 thin films treated in NH3 atmosphere by optical dispersion models[J]. Thin Solid Films, 2009, 517(24): 6694~6699

[27] 喻波, 李春, 金春水. 基于掠入射X射线反射谱的Mo/Si多层膜扩散系数测量[J]. 中国激光, 2011, 38(11): 1107002

    Yu Bo, Li Chun, Jin Chunshui. Diffusion coefficient measurement by grazing incidence X-ray reflection in a Mo/Si multilayer[J]. Chinese J. Lasers, 2011, 38(11): 1107002

贾红宝, 孙菁华, 徐耀, 吴东, 吕海兵, 晏良宏, 袁晓东. 利用透射光谱与X射线反射谱精确测量溶胶凝胶TiO2薄膜厚度和光学常数[J]. 光学学报, 2012, 32(8): 0831001. Jia Hongbao, Sun Jinghua, Xu Yao, Wu Dong, Lü Haibing, Yan Lianghong, Yuan Xiaodong. Determination of Thickness and Optical Constants of Sol-Gel Derived TiO2 Films by Combined Analysis of Transmittance and X-Ray Reflectivity Spectra[J]. Acta Optica Sinica, 2012, 32(8): 0831001.

本文已被 5 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!