超精密位移测量系统是光刻机不可或缺的关键分系统之一，而基于激光外差干涉技术的超精密位移测量系统同时具备亚纳米级分辨率、纳米级精度、米级量程和数米每秒的测量速度等优点，是目前唯一能满足光刻机要求的位移测量系统。目前应用于光刻机的超精密位移测量系统主要有双频激光干涉仪和平面光栅测量系统两种，二者均以激光外差干涉技术为基础。本文将分别对这两种测量系统的原理、优缺点以及在光刻机中的典型应用进行阐述。

作为一种超精密的非接触式测量设备，双频激光干涉测量系统可以在保证纳米级测量精度的情况下实现大范围和高速度测量，因而获得非常广泛的用途。环境是影响激光干涉测量系统测量精度的最大因素，为了获得纳米测量精度，必须对测量环境进行补偿。因此，重点研究了环境补偿技术，并研制了一种新型波长跟踪器，与Edlen经验公式进行对比测试，结果表明新型波长跟踪器具有良好的补偿效果。采用自制波长跟踪器补偿之后，被测运动台伺服精度可达1.61 nm。

A micro-Gal absolute gravimeter based on high-precision and high-stability heterodyne interferometer is presented. The distance measuring technology of the gravimeter is studied in detail. The experimental results of distance measuring for a free-falling motion show that the high-precision heterodyne interferometer described in this paper can meet the demand of a micro-Gal absolute gravimeter with relative uncertainty of 6.4*10^(-9). Moreover, the heterodyne interferometer is more stable than the Mach-Zehnder interferometer (MZI) which is widely used in present absolute gravimeters.

There is an increasing demand on the measurable velocity of laser interferometer in manufacturing technologies. The maximum measurable velocity is limited by frequency difference of laser source, optical configuration, and electronics bandwidth. An experimental setup based on free falling movement has been demonstrated to measure the maximum measurable velocity for interferometers. Measurement results show that the maximum measurable velocity is less than its theoretical value. Moreover, the effect of kinds of factors upon the measurement results is analyzed, and the results can offer a reference for industrial applications.

为了减少由于加速度所导致的激光双频干涉仪测量误差,引入二阶多普勒频移,建立了由被测物体加速度所引起的测量误差的理论模型。仿真结果表明,在0.4s时间内0.6g加速度所引起的累积误差可达2.5 nm左右,这对于纳米精度的测量是不应忽视的; 初速度不为零时加速运动会引起更大的误差,而减速运动所引起的误差则相对小。通过实验验证,所测的误差变化趋势与理论模拟比较吻合。

为了满足对高速变化的偏振态的测量,提出一种能够对偏振态实现高速测量的技术。阐述了利用1/4波片与起偏器测量偏振光的斯托克斯参量常规的原理和方法,根据高速测量的要求推导出了新的斯托克斯参量计算公式,并依据此公式设计了基于多通道偏振态高速测量的方案,设计了具体的方法并编写了控制与算法程序。测试表明,该系统的测量速度达到了每秒700次偏振态测量,测量速度主要由电子线路的性能决定,测得的结果稳定可靠实现了光纤传输偏振态的高速测量。

A new technology of lightning location is described, which is based on detecting the state of polarization (SOP) fluctuation of the laser light in the optic ground wire (OPGW). Compared with the conventional lightning location method, the new method is more accurate, more stable, and cheaper. Theories of Stokes parameters and Poincare sphere are introduced to analyze the SOP at the lightning strike point. It can be concluded that although the initial points of SOP on the Poincare sphere are random, the SOP fluctuation generated by lightning strike can still be accurately identified by detecting the velocity of polarization motion. A new algorithm to quantify the velocity is also introduced.

研究了长距离飞行光学(flying optics)高斯光束聚焦特性, 理论研究表明：将某一特定谐振腔的瑞利长度ZR取代q参量虚部的光斑尺寸w时, q参量的ABCD定律可以从基模推广到高阶模或几个模的叠加, 并推导出飞行光学实际焦距与几何焦距之差Df的计算公式。为了精确控制飞行光学聚焦特性, 研制了一套自适应飞行光学聚焦特性控制仪, 实验和理论比较吻合。

报道了一台中功率高稳定度高效率实用型XeOl准分子激光器及其工作特性.最大单脉冲能量为405mJ,最大平均功率达到3lW.不同电压下的转换效率均大于1.4%,最高达1.8%.在工作电压为22kV左右时进行10~6次寿命试验,其输出功率保持15W,波动性小于±7%.