Nong Li 1,2Dongwei Jiang 1,2,3,*Guowei Wang 1,2,3Weiqiang Chen 1,2[ ... ]Zhichuan Niu 1,2,3,**
Author Affiliations
Abstract
1 State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 101408, China
3 Center of Materials Science and Optoelectronics Engineering, College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
4 Key Laboratory of Semiconductor Materials Science, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
For the measurement of responsivity of an infrared photodetector, the most-used radiation source is a blackbody. In such a measurement system, distance between the blackbody, the photodetector and the aperture diameter are two parameters that contribute most measurement errors. In this work, we describe the configuration of our responsivity measurement system in great detail and present a method to calibrate the distance and aperture diameter. The core of this calibration method is to transfer direct measurements of these two parameters into an extraction procedure by fitting the experiment data to the calculated results. The calibration method is proved experimentally with a commercially extended InGaAs detector at a wide range of blackbody temperature, aperture diameter and distance. Then proof procedures are further extended into a detector fabricated in our laboratory and consistent results were obtained.
infrared photodetectors responsivity calibration cavity blackbody Journal of Semiconductors
2023, 44(10): 102301
1 长春理工大学 理学院, 吉林 长春 130022
2 中国计量科学研究院热工所, 北京 100029
傅里叶红外光谱仪(FTIR)光谱响应度的标定工作是FTIR红外光谱精准测量的基础。基于中国计量科学研究院(NIM)的ThermoGage HT9500型高温基准黑体辐射源, 对NIM搭建的FTIR高温黑体红外辐射特性测量系统的光谱响应度, 通过分段线性标定法进行了标定实验。建立并描述了FTIR测量高温黑体红外辐射特性系统响应度函数标定模型, 并通过测量的黑体辐射源在1 273~1 973 K温区、1~14 μm宽频谱内的红外光谱, 对FTIR测量系统的光谱响应度进行了标定实验研究。结果表明: 分段线性标定FTIR红外光谱测量系统方法具有良好可靠性。1 373~1 873 K温区的测量光谱与基于黑体标定的计算光谱在1~14 μm频谱内平均偏差优于1%, 黑体光谱辐射亮度峰值波长上反演得到的黑体计算温度与实际温度偏差优于0.45%。
计量学 响应度标定 傅里叶红外光谱 高温黑体 宽频谱 metrology responsivity calibration FTIR high temperature blackbody wideband spectrum 红外与激光工程
2019, 48(7): 0718002
1 中国计量大学 计量测试工程学院 计量技术实验教学示范中心, 浙江 杭州 310018
2 中国计量科学研究院 光学所, 北京 100029
3 浙江华东光电仪器有限公司, 浙江 嘉兴 314001
为了保障太赫兹探测器测试的准确度和可信度, 对太赫兹探测器响应度定标溯源技术进行研究, 针对常用太赫兹探测器黑体辐射测试技术存在对环境、设备要求高和搭建难度大等问题, 以中国计量科学研究院的热电型太赫兹探测器作为计量标准, 提出一种校准方案, 设计搭建了一套太赫兹探测器响应度定标系统。为提高定标准确度, 实验测试了定标光学系统的光束质量, 并合理设置光阑孔径以满足定标要求。在0.1 THz频点处对2个响应度未知的场效应自混频太赫兹探测器进行响应度定标。结果表明, 定标的相对扩展不确定度为6.80% (k=2), 验证了定标系统的可行性, 系统可实现太赫兹探测器功率响应度溯源到国家激光功率标准, 保障太赫兹功率测量的准确可靠。
光学计量仪器 太赫兹 响应度定标 标准探测器 optical metrology instruments terahertz responsivity calibration standard detector
