研究了一种基于偏振光的集成式单频激光干涉仪。利用偏振光学变换方法，实现了干涉仪的光学4细分结构，提高了测量灵敏度；构建4路正交探测结构，实现了干涉仪的无源偏振调制，扩大了干涉仪测量范围；采用光路集成化的设计方法，实现了一体化干涉仪光路集成。对激光干涉仪进行振动测量实验研究，结果表明，静态位移测量误差小于±0.3 nm，振动测量的分辨率达10 pm/Hz1/2；上述集成单频激光干涉仪具有测量精度高、稳定性好、动态范围宽、受环境影响小等优点，可被广泛用于纳米测量的各个领域。

A micro-Gal absolute gravimeter based on high-precision and high-stability heterodyne interferometer is presented. The distance measuring technology of the gravimeter is studied in detail. The experimental results of distance measuring for a free-falling motion show that the high-precision heterodyne interferometer described in this paper can meet the demand of a micro-Gal absolute gravimeter with relative uncertainty of 6.4*10^(-9). Moreover, the heterodyne interferometer is more stable than the Mach-Zehnder interferometer (MZI) which is widely used in present absolute gravimeters.

介绍了一种新型的纳米级精度位移测量激光干涉仪。提出了耦合差动干涉的新方法。通过对光程差进行倍增，提高了干涉仪的分辨率和稳定性。该干涉仪结构简洁紧凑，光路布局对称性好，不存在死光程，容易装调，符合阿贝原则和结构变形最小原则，在10 mm(可以扩展至50 mm)测量范围内，获得了λ/1600的分辨率和纳米级的测量精度。