华东师范大学精密光谱科学与技术国家重点实验室, 上海 200241
提出了一种在玻璃表面制备嵌入式亚微米金属线的方法。首先利用飞秒激光直写技术在玻璃表面烧蚀出亚微米线宽的凹槽,然后采用连续流化学镀工艺在样品表面沉积金属薄膜,再经过热处理和机械抛光,可实现玻璃表面嵌入式亚微米线宽金属结构的可控制备。将飞秒激光烧蚀的阈值效应与连续流化学镀相结合,可制备出最小线宽约为0.66 μm的金属银线。四探针法测试结果表明,制备的亚微米金属银线具有良好的导电性,其电阻率约为体积银电阻率的1.2倍。
激光技术 飞秒激光烧蚀 石英玻璃 阈值效应 连续流化学镀 亚微米金属线
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Graduate University of Chinese Academy of Sciences, Beijing 100049, China
Different pattern structures are obtained on the AgInSbTe (AIST) phase change film as induced by laser beam. Atomic force microscopy (AFM) was used to observe and analyze the different pattern structures. The AFM photos clearly show the gradually changing process of pattern structures induced by different threshold effects, such as crystallization threshold, microbump threshold, melting threshold, and ablation threshold. The analysis indicates that the AIST material is very effective in the fabrication of pattern structures and can offer relevant guidance for application of the material in the future.
图形结构 AgInSbTe 原子力显微镜 阈值效应 210.4810 Optical storage-recording materials 180.6900 Three-dimensional microscopy Chinese Optics Letters
2011, 9(8): 082101
中国科学院安徽光学精密机械研究所激光光谱学开放实验室,合肥,230031
本文讨论了受激布里渊散射的阈值效应对后向受激散射光(泵浦光的相位共轭波)线宽、发散角、脉宽、能量集中度的影响,利用其阈值效应可以获得一个面积尽量小的共轭光斑.
受激布里渊散射 相位共轭 阈值效应 SBS （stimulated Brillouin-scattering） optical phase conjugation threshold effect
