激光杂志, 2008, 29 (2): 31, 网络出版: 2008-08-17
基于狭缝方程的二次扭曲光栅的设计与衍射模拟
The design of quadratically distorted grating based on slit equation and simulation of diffraction
摘要
分析了二次扭曲光栅的原理,推导了二次扭曲光栅的狭缝方程,分析了其衍射特性,根据狭缝方程对光栅掩模图样进行了设计举例,最后对二次扭曲光栅的衍射特性进行了计算机模拟.
Abstract
参考文献
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沈洪斌, 张雏, 司宾强. 基于狭缝方程的二次扭曲光栅的设计与衍射模拟[J]. 激光杂志, 2008, 29(2): 31. 沈洪斌, 张雏, 司宾强. The design of quadratically distorted grating based on slit equation and simulation of diffraction[J]. LaserJournal, 2008, 29(2): 31.
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