基于滑模控制器的压电执行器线性化控制研究
[1] ZHANG X,TAN Y.A hybrid model for rate-dependent hysteresis in piezoelectric actuators[J].Sensors Actuators A:Physical,2010,157(1):54-60.
[2] 袁刚,李世栋,王代华.一种压电陶瓷叠堆执行器刚度测量方法研究 [J].仪器仪表学报,2015,36(3):568-573.
[3] POLITS S,DONG J.Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing[J].IEEE/ASME Transactions on Mechatronics,2011,16(4):724-733.
[4] DAVOODI A A,IZADI I,GHAISARY J.Design and Implementation of a feedforward feedback controller for a piezoelectric Actuator[C]//Iranian: Iranian Conference on Electrical Engineering (ICEE),2019:759-1346.
[5] 范伟,林瑜阳,李钟慎.压电陶瓷驱动器的迟滞特性[J].光学精密工程,2016,24(5):1112-1117.
[6] 孙翰,时运来,孙海超,等.基于PA41的压电叠堆驱动电源设计[J].压电与声光,2022,44(1):68-72.
[8] AHMED K,YAN P,LI S.Duhem model-based hysteresis identification in piezo-actuated nano-stage using modified particle swarm optimization[J].Micromachines,2021,12(3):315.
[9] AHMAD I,ALI M A,KO W.Robust μ-synthesis with dahl model based feedforward compensator design for piezo-actuated micropositioning stage[J].IEEE Access,2020(99):1.
[10] 王贞艳,贾高欣.压电陶瓷作动器非对称迟滞建模与内模控制[J].光学精密工程,2018,26(10):2484-2492.
[12] NGUYEN P B,CHOI S B,SONG B K.A new approach to hysteresis modelling for a piezoelectric actuator using Preisach model and recursive method with an application to open-loop position tracking control[J].Elsevier,2018,27(1): 136-152.
[13] 胡俊峰,何建康,杨明立.压电式二维微定位平台的率相关迟滞建模[J].振动与冲击,2020,39(6):104-110.
[14] 陈辉,谭永红,周杏鹏,等.压电陶瓷执行器的动态模型辨识与控制[J].光学精密工程,2012,20(1):88-95CHEN H,TAN Y H,ZHOU X P,et al.Identification and control of dynamic modeling for piezoelectric ceramic [J].Optical and Precision Engineering,2012,20 (1):88-95.(下转第871页)
凌金成, 刘志强, 周振华, 周民瑞. 基于滑模控制器的压电执行器线性化控制研究[J]. 压电与声光, 2023, 45(6): 859. LING Jincheng, LIU Zhiqiang, ZHOU Zhenhua, ZHOU Minrui. Study on Linearization Control of Piezoelectric Actuator Based on Sliding Mode Controller[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 859.