一款2, 4 GHz WiFi频段FBAR带通滤波器设计

唐小龙; 刘娅; 蒋平英; 张必壮; 徐瑞豪; 刘繁; 张建清; 司美菊; 吕俊豪; 杜雪松

doi:doi:10.11977/j.issn.1004-2474.2022.02.005

压电与声光, 2022, 44 (2): 191, 网络出版: 2022-06-14

一款2, 4 GHz WiFi频段FBAR带通滤波器设计

Design of a 2, 4 GHz WiFi Band FBAR Bandpass Filter

论文大纲

唐小龙刘娅蒋平英张必壮徐瑞豪刘繁张建清司美菊吕俊豪杜雪松

作者单位

中国电子科技集团公司第二十六研究所,重庆 400060

薄膜体声波谐振器(FBAR) WiFi频段体声波(BAW) 滤波器 Mason模型 film bulk acoustic wave resonator(FBAR) WiFi band bulk acoustic wave(BAW) filter Mason model

摘要

该文设计了一款2, 4 GHz WiFi频段(2 401~2 483 MHz)薄膜体声波谐振器(FBAR)滤波器。采用一维Mason电路模型，在ADS中搭建了阶梯形滤波器电路;在HFSS中建立了封装结构和测试电路有限元电磁模型，并在ADS中完成了联合仿真设计。通过微机电系统(MEMS)工艺制备与测试，滤波器在2 401~2 483 MHz频段的插入损耗≤2, 2 dB。在2 520~2 900 MHz处,带外抑制≥40 dB，滤波器体积仅1, 1 mm×0, 9 mm×0, 65 mm。

Abstract

A film bulk acoustic wave resonator(FBAR) filter operating at 2, 4 GHz WiFi band (2 401~2 483 MHz) is designed in this paper, This design is a ladder filter based on the one-dimensional Mason circuit model of FBAR, which is built in ADS,the finite element electromagnetic model of packaging structure and test circuit is established in HFSS,and the joint simulation design is completed in ADS, Through MEMS process preparation and test,the insertion loss of the filter at 2 401~2 483 MHz frequency band, the insertion loss is ≤2, 2 dB,the out of band rejection at 2 520~2 900 MHz is ≥40 dB,and the volume of the filter is only 1, 1 mm×0, 9 mm×0, 65 mm,

参考文献

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唐小龙, 刘娅, 蒋平英, 张必壮, 徐瑞豪, 刘繁, 张建清, 司美菊, 吕俊豪, 杜雪松. 一款2, 4 GHz WiFi频段FBAR带通滤波器设计[J]. 压电与声光, 2022, 44(2): 191. TANG Xiaolong, LIU Ya, JIANG Pingying, ZHANG Bizhuang, XU Ruihao, LIU Fan, ZHANG Jianqing, SI Meiju, LYU Junhao, DU Xuesong. Design of a 2, 4 GHz WiFi Band FBAR Bandpass Filter[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 191.

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