矢量测量是表征太赫兹波段天线与准光系统波束特性的主流技术。该文介绍了一种基于AlGaN/GaN高电子迁移率晶体管（High-electron-mobility transistor, HEMT）混频探测器的太赫兹矢量测量系统。该系统核心器件为以准光-波导为耦合方式的高灵敏度太赫兹混频探测器，在340 GHz频率外差模式下，其噪声等效功率达−113 dBm/Hz。为了抑制系统相位噪声，搭建了基于二次下变频原理的硬件电路。通过对固定位置天线的长时间测量，表明系统相位稳定度优于4°，系统最小可测功率达到119 nW。基于相干AlGaN/GaN HEMT混频探测器实现了太赫兹连续波幅度和相位分布测量，该工作为后续阵列化太赫兹矢量测量提供了基础。

Vector measurement is an important technology for beam testing of antennas and quasi-optical systems in terahertz band. This paper introduces a terahertz vector measurement system based on a high-sensitivity AlGaN/GaN high-electron-mobility transistor (HEMT) terahertz detector integrated with a quasi-optical lens and waveguide together, which reached the noise equivalent power of -113 dBm/Hz in heterodyne mode at 340 GHz. A hardware circuit is established based on the double frequency-down-conversion technique to suppress phase noise in the system. The experimental results indicate that the minimum measurable power is 119 nW and the phase stability is better than 4° of the system. Measurement of the distribution of both terahertz amplitude and phase has been achieved based on this coherent AlGaN/GaN HEMT detector. An arrayed terahertz vector measurement system could be developed based on this work.