基于铌酸锂/BCB/聚酰亚胺结构的柔性声表面波器件的设计与仿真
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陈健中, 彭斌, 张万里, 林庚辉, 高令桥. 基于铌酸锂/BCB/聚酰亚胺结构的柔性声表面波器件的设计与仿真[J]. 压电与声光, 2023, 45(2): 169. CHEN Jianzhong, PENG Bin, ZHANG Wanli, LIN Genghui, GAO Lingqiao. Design and Simulation of Flexible Surface Acoustic Wave Device Based on Lithium Niobate/BCB/Polyimide Structure[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 169.