基于165Y-75Y LiNbO3的声表面波器件的声光互作用性能分析

该文从理论上仿真了切割方向为165°Y，传播方向为75°Y的LiNbO3晶体(简称165Y LN)的表面波声光调制器的场分布及其重叠积分、驱动功率随波导厚度变化的关系，并与其他切割方向的仿真结果进行了比较。该方向位于材料退耦面内，且在该面具有最大的机电耦合系数，是潜在的高性能切割方向。测试表明，165Y LN的TE模和TM模在低频区均有较低的驱动功率和较大的重叠积分带宽，可被用于制作具有高性能且对偏振不敏感的表面波声光器件。

Abstract

The field distribution, overlap integral and the relationship between driving power and waveguide thickness variation of surface acoustic wave (SAW) acousto-optic modulator based on 165°Y-cut 75°Y-propagation LiNbO3 (165Y LN) has been simulated theoretically in this paper, and compared with the simulation results in other cut direction. This cut direction is located within the material decoupling surface and has the highest electromechanical coupling factor coefficient, making it a potential high performance cutting direction. The test results show that both TE and TM modes of 165Y-LN have lower driving power and larger overlap integral bandwidth at low frequency range, which makes 165°Y-75°Y LN suitable for fabrication high performance and polarization-insensitive SAW acoustic-optic devices.

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郭谦, 李楠, 王石语, 路远. 基于165Y-75Y LiNbO3的声表面波器件的声光互作用性能分析[J]. 压电与声光, 2023, 45(5): 657. GUO Qian, LI Nan, WANG Shiyu, LU Yuan. Analysis of Acousto-Optic Interaction for Surface Acoustic Wave Devices Based on 165Y-75Y LiNbO3[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 657.

基于165Y-75Y LiNbO3的声表面波器件的声光互作用性能分析

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