为了得到较理想的激光刻蚀结果, 采用355nm固体紫外激光, 分别在空气与水中进行了氧化铝陶瓷片激光刻蚀实验。对激光主要参量如脉冲能量密度、激光扫描速率、激光重复频率等对水下刻蚀深度和质量的影响进行了对比研究; 对激光刻蚀的机理以及水辅助刻蚀的物理过程进行了分析, 分别得到了紫外激光在空气中与水下的刻蚀形貌与不同激光参量下的刻蚀深度数据。结果表明, 水辅助激光刻蚀可以提高刻蚀效率, 改善刻蚀质量; 水下激光刻蚀深度与激光的脉冲能量密度、加工速率、重复频率和水的深度等参量有密切的关系; 水辅助激光刻蚀过程中水的冷却作用以及产生的空泡有效防止去蚀材料的二次黏附, 避免变质层的形成, 既提高了刻蚀质量, 同时也增加了刻蚀深度。

To obtain better result of laser etching, micro-machining of alumina ceramics with ultraviolet(UV) laser (355nm) was conducted in air and water respectively. The impact of laser parameters, such as laser fluence, scan speed, and laser frequency on the etching depth was investigated. The mechanism of laser etching and the physical process of water-assisted etching were studied. Etching morphology in air and water with UV laser and etching depth with different laser parameters were obtained. The results show that water-assisted laser etching can improve the etching efficiency and etching surface quality. The etching depth has close relationship with laser fluence, scan speed, laser frequency and water depth. The water cooling effect and vacuum occurring during water-assisted etching could prevent the secondary adhesion to the eclipse material effectively and the formation of metamorphic layer.