设计了一种6 bit 6~18 GHz工作频段的宽带高精度有源移相器。片上集成了输入无源巴伦、逻辑编码器、RC多相滤波器、矢量合成单元、数控单元等。该移相器的设计采用55 nm CMOS工艺实现,芯片尺寸为1.29 mm×0.9 mm,移相器核心尺寸为1.02 mm×0.58 mm。后仿结果表明,在6~18 GHz频率范围内,增益误差RMS值小于1 dB,相位误差RMS值小于0.75°,输入回波损耗、输出回波损耗分别小于-8.5 dB、-8.9 dB,芯片总功耗为20.7 mW。该6 bit移相器的相对带宽为100%,覆盖C、X和Ku波段,适用于雷达探测等领域。

A 6-bit wideband high accuracy active phase shifter with 6~18 GHz frequency range was designed. The passive baluns, poly-phase filters, vector-sum cells and digital controlled cells were included in the proposed phase shifter. This phase shifter was implemented in a 55 nm CMOS process. The overall chip size was 1.29 mm×0.9 mm, and the phase shifter core chip size was 1.02 mm×0.58 mm. The post-simulation results showed that the RMS gain variation was less than 1 dB, and the RMS phase error was less than 0.75° within 6~18 GHz frequency range. The input and output return losses were less than -8.5 dB and -10 dB, and the total power consumption was 20.7 mW. The relative bandwidth of the 6 bit phase shifter was 100%, covering C, X and Ku band. It was suitable for radar detection and other applications.