近年来, 航空航天领域的飞速发展要求振动测量技术能耐受更高温度, 因此高温压电加速度传感器备受关注。通过优化压电晶体切型和设计质量块结构, 该文设计并制备了基于硅酸镓钽钙(CTGS)压电单晶材料的压电加速度传感器。实验结果表明, 该传感器的谐振频率约为2.2 kHz。在振动频率为100 Hz~1.1 kHz下, 常温时传感器的电荷灵敏度基本稳定, 平均值为2.44 pC/g(g=9.8 m/s2)。在常温~600 ℃内, 传感器的电荷灵敏度基本保持不变, 1.1 kHz振动频率下传感器的电荷灵敏度平均值为2.56 pC/g。该传感器能在600 ℃高温下稳定工作。

In recent years, the rapid development of the aerospace field has put forward requirements for vibration measurement technology that can with stand higher temperature, and the high temperature piezoelectric acceleration sensors have attracted much attention. By optimizing the crystal cut and designing the mass structure, a piezoelectric acceleration sensor based on CTGS piezoelectric single crystal materialis designed and fabricated in this work. The experimental results show that the resonant frequency of the sensor is around 2.2 kHz.When the vibration frequency changes from 100 Hz to 1.1 kHz,the charge sensitivity at room temperature is basically stable with an average value of 2.44 pC/g(g=9.8 m/s2).The charge sensitivity of the sensor remains basically unchanged from the room temperature to 600 ℃,and the average charge sensitivity at the vibration frequency of 1.1 kHz is 2.56 pC/g. The sensor can work stably at a high temperature of 600 ℃.