针对单刀多掷开关(SPMT)在相控阵雷达、宽带收发器中用于切换滤波器和传输线时需要满足宽频带、高隔离度的性能需求, 设计了一种宽频带、高隔离度的MEMS单刀三掷开关(SP3T)。通过ANSYS电磁仿真软件中的HFSS模块对MEMS SP3T开关进行优化, 利用COMSOL软件对上电极的机械性能进行仿真。仿真结果表明, 所设计的MEMS SP3T开关可工作在1~90 GHz的频带内, 且插入损耗小于1 dB@90 GHz, 隔离度大于35 dB@90 GHz, 其整体体积约为075 mm3。

Since the single-pole multi-throw switch (SPMT) needs to meet the performance requirements of broadband and high isolation when it is used to switch filters and transmission lines in phased array radars and bandwidth transceivers, a broadband and high isolation MEMS single-pole three throw switch (SP3T) was designed. The MEMS SP3T switch was optimized by using the HFSS module in ANSYS electromagnetic simulation software, and the mechanical properties of the upper electrode were simulated by COMSOL software. The simulation results show that the designed MEMS SP3T switch can work in the frequency band of 1-90 GHz. The insertion loss is less than 1 dB@90 GHz, the isolation is greater than 35 dB@90 GHz, and the overall volume is about 075 mm3.