一种L~E波段的A型上电极MEMS单刀三掷开关设计

针对单刀多掷开关(SPMT)在相控阵雷达、宽带收发器中用于切换滤波器和传输线时需要满足宽频带、高隔离度的性能需求, 设计了一种宽频带、高隔离度的MEMS单刀三掷开关(SP3T)。通过ANSYS电磁仿真软件中的HFSS模块对MEMS SP3T开关进行优化, 利用COMSOL软件对上电极的机械性能进行仿真。仿真结果表明, 所设计的MEMS SP3T开关可工作在1~90 GHz的频带内, 且插入损耗小于1 dB@90 GHz, 隔离度大于35 dB@90 GHz, 其整体体积约为075 mm3。

Abstract

Since the single-pole multi-throw switch (SPMT) needs to meet the performance requirements of broadband and high isolation when it is used to switch filters and transmission lines in phased array radars and bandwidth transceivers, a broadband and high isolation MEMS single-pole three throw switch (SP3T) was designed. The MEMS SP3T switch was optimized by using the HFSS module in ANSYS electromagnetic simulation software, and the mechanical properties of the upper electrode were simulated by COMSOL software. The simulation results show that the designed MEMS SP3T switch can work in the frequency band of 1-90 GHz. The insertion loss is less than 1 dB@90 GHz, the isolation is greater than 35 dB@90 GHz, and the overall volume is about 075 mm3.

参考文献

[1] 刘秋慧. 面向5G通信应用的RF MEMS开关设计与制造关键技术研究［D］. 太原: 中北大学, 2019: 1-2.

[2] 韩路路, 吴倩楠, 王姗姗, 等. 基于RF MEMS开关的交指型可切换带通滤波器设计［J］. 微电子学, 2021, 51(1): 106-111.

[3] 范丽娜, 吴倩楠, 王姗姗, 等. 一种雪花型MEMS单刀五掷开关的研究与设计［J］. 微电子学, 2021, 51(4): 533-538.

[4] LI M, ZHANG Y, ZHAO Y, et al. Design and fabrication of a 4-bit RF MEMS attenuator with a high attenuation accuracy ［J］. Analog Integrated Circuits and Signal Processing, 2020, 102(7): 617-624.

[5] 王姗姗, 吴倩楠, 韩路路, 等. 一种小型化射频MEMS电子校准件设计［J］. 微电子学, 2021, 51(4): 494-499.

[6] ZHANG N B, MEI L R, WANG C T, et al. A switchable bandpass filter employing RF MEMS switches and open-ring resonators ［J］. IEEE Trans Elec Dev, 2017, 64(1): 1-7.

[7] LU D, YU M, BARKER N S, et al. A simple and general method for filtering power divider with frequency fixed and frequency-tunable fully canonical filtering response demonstrations ［J］. IEEE Transactions on Microwave Theory and Techniques, 2019, 67(5): 1812-1825.

[8] 王玲, 唐小宏, 肖飞, 等. 嵌入吸收式单刀八掷开关电路［J］. 电子科技大学学报, 2015, 44(6): 830-834.

[9] DEY S, KOUL S K, PODDAR A K, et al. Reliable and compact 3- and 4-bit phase shifters using MEMS SP4T and SP8T switches ［J］. Journal of Microelectro- mechanical Systems, 2018, 27(1): 113-124.

[10] 王姗姗, 吴倩楠, 李强, 等. K型单刀四掷RFMEMS开关设计［J］. 传感器与微系统, 2021, 40(4): 70-73.

[11] DEY S, KOUL S K, PODDAR A K, et al. 17-30 GHz reliable and compact analog phase shifter using lateral micromachined SP7T switches, and DMTL arrays ［J］. Progress In Electromagnetics Research C, 2021, 116(1): 157-169.

[12] DEMIREL K, YAZGAN E, DEMIR S, et al. A new temperature-tolerant RF MEMS switch structure design and fabrication for Ka-band applications ［J］. Journal of Microelectromechanical Systems, 2016, 25(1): 60-68.

[13] LI M W, LIU Q H, WU Q N, et al. Broadband radio frequency MEMS series contact switch with low insertion loss ［J］. Microsystem Technologies, 2019, 25(5): 1619-1625.

[14] 高跃升. 高可靠性RF MEMS单刀双掷开关设计及加工关键技术研究［D］. 太原: 中北大学, 2020: 3-4.

[15] 吴学石. 微电子机械系统降阶建模方法研究［D］. 杭州: 浙江大学, 2006: 13-14.

宁朝东, 湛永鑫, 吴倩楠, 王俊强, 李孟委. 一种L~E波段的A型上电极MEMS单刀三掷开关设计[J]. 微电子学, 2023, 53(3): 506. NING Chaodong, ZHAN Yongxin, WU Qiannan, WANG Junqiang, LI Mengwei. Design of an A-type Upper Electrode MEMS Single Pole Three Throw Switch in the L-E Band[J]. Microelectronics, 2023, 53(3): 506.

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