中国激光, 2023, 50 (8): 0802106, 网络出版: 2023-03-28  

GH3230高温合金绿光飞秒激光的刻蚀特性

Ablation Characteristics of GH3230 Superalloy Using Green Femtosecond Laser
作者单位
1 北京工业大学材料与制造学部高功率及超快激光先进制造实验室,北京 100124
2 北京动力机械研究所,北京 100074
摘要
飞秒激光以其超窄脉宽和超高光强等特性被广泛应用于各种金属材料的加工。本课题组采用波长为515 nm的绿光飞秒激光器对GH3230镍基高温合金进行刻蚀试验,研究了GH3230高温合金的绿光飞秒激光刻蚀阈值、刻蚀率和极限刻蚀深度。结果表明:相比于红外飞秒激光,绿光飞秒激光的刻蚀阈值明显降低,刻蚀率显著提高;与红外飞秒激光刻蚀类似,随着刻蚀次数增加,刻蚀深度增大,但当刻蚀次数增加到一定值后,刻蚀深度出现饱和现象;激光能量密度越高,极限刻蚀深度越大;改变扫描策略进行双道刻蚀时,通过增加刻缝宽度可以增大刻蚀深度;激光诱导等离子体是影响刻蚀深度的主要因素。
Abstract
Objected

Nickel-based superalloys exhibit high potential as raw materials for heated-end-core components because of their superior structural stability, oxidation resistance, corrosion resistance, fatigue resistance, and creep resistance. When compared to electrical discharge machining and normal pulsed laser machining, femtosecond laser machining offers higher precision and a lower heat effect. When a femtosecond laser pulse irradiates a metallic surface, electrons absorb photons and reach high temperature while the lattice remains unchanged, resulting in a low thermal effect. So, the femtosecond laser is expected to have the potential for machining GH3230 superalloys. At present, some reports have focused on femtosecond laser drilling technology and the increase of hole depth of nickel-based alloys, whereas femtosecond laser ablation technology and its characteristics on nickel-based alloys are yet to be discussed. In this study, a green femtosecond laser with a wavelength of 515 nm was used to investigate the ablation threshold, ablation rate, and ablation depth of a GH3230 nickel-based superalloy. Furthermore, an increase in the scanning width is proposed to expand the ablation depth. The effect of plasma induced by a femtosecond laser on the ablation depth is analyzed.

Methods

An as-forged GH3230 superalloy with a thickness of 1.2 mm was used as the base metal in laser ablation. First, a green femtosecond laser with a wavelength of 515 nm was used to ablate the GH3230 surface. The ablation width was measured using a white-light interferometer. The ablation thresholds at different scanning speeds were calculated by fitting the relationship curve between ablation width and laser fluence. The multi-pulse threshold incubation coefficient of GH3230 and ablation threshold of GH3230 under a single laser pulse were obtained by fitting the relationship curve between the ablation threshold and equivalent pulse number. The absorption spectrum of GH3230 was obtained using a spectrophotometer. After various scanning times ranging from 800 to 20000, the ablation depth and width were measured using an optical microscope (OM) with laser fluences of 1.27, 2.54 and 3.81 J/cm2. The saturation of the ablation depth and the limitation of the ablation rate were analyzed to reveal the advantages of green femtosecond laser machining. Finally, the ablation characteristics of GH3230 were adjusted using the overlapping scanning method. The ablation depth and width were measured by OM to obtain the ultimate ablation depth, ablation rate, and depth-to-width ratio. The effect of the scanning spacing is further discussed.

Results and Discussions

In this study, the ablation threshold of GH3230 using a green femtosecond laser was lower than the previously reported ablation threshold of nickel-based alloys using an infrared femtosecond laser. The main reason for this is that the absorption of the green light wave band is much higher than that of the red band. The green laser also reduces the ablation threshold owing to its higher photon energy, which possibly removes materials more efficiently. In the overlapping scanning method, both the ablation width and depth increase. The ablation efficiency of the green femtosecond laser is higher than that of the infrared femtosecond laser. As the scanning width increases, the ablation width increases, which causes the plasma to diffuse laterally and weakens the shielding effect of the plasma on the laser. The energy at the bottom of the groove increases the ablation depth and efficiency.

Conclusions

In this study, the single-pulse laser ablation threshold of as-forged GH3230 superalloy using a green femtosecond laser with a wavelength of 515 nm was 0.27 J/cm2. With an increase in the number of scanning, the ablation depth increases and the beam energy entering the groove bottom decreases. Finally, the ablation depth tends to saturate. In the overlapping scanning method, with an increase in ablation width, the plasma diffuses laterally and reduces the plasma density. The reduction in plasma density increases the ablation depth limit but decreases the depth-to-width ratio of the groove. Compared with an infrared femtosecond laser, the green femtosecond laser can significantly reduce the ablation threshold and improve ablation efficiency.

黄彩丽, 蒋麒, 蔺晓超, 杨诗瑞, 郭鹏, 崔梦雅, 黄婷. GH3230高温合金绿光飞秒激光的刻蚀特性[J]. 中国激光, 2023, 50(8): 0802106. Caili Huang, Qi Jiang, Xiaochao Lin, Shirui Yang, Peng Guo, Mengya Cui, Ting Huang. Ablation Characteristics of GH3230 Superalloy Using Green Femtosecond Laser[J]. Chinese Journal of Lasers, 2023, 50(8): 0802106.

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